SMU Common Specifications
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Output terminal/connection
Dual triaxial connector, Kelvin (remote sensing)
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Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
•
Voltage compliance:
0 V to ± 100 V (MPSMU, HRSMU)
0 V to ± 200 V (HPSMU)
0 V to ± 30 V (MCSMU)
•
Current compliance:
± 10 fA to ± 100 mA (HRSMU/MPSMU with ASU)
± 100 fA to ± 100 mA (HRSMU)
± 1 pA to ± 100 mA (MPSMU)
± 1 pA to ± 1 A (HPSMU)
± 10 nA to ± 1 A (MCSMU)
•
Compliance accuracy:
Same as the current or voltage set accuracy.
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Pulsed measurement
Programmable pulse width, period, and delay:
For HPSMU, MPSMU, HRSMU
Width: 500 s to 2 s, 100 s resolution
•
Period: 5 ms to 5 s, 100 s resolution
•
Period Width+2 ms (when Width 100 ms)
Period Width+10 ms (when Width > 100 ms)
•
Delay: 0 s
Keysight B1500A User's Guide, Ed ition 14
Specifications
Hardware
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