Keysight Technologies B1500A User Manual page 130

Semiconductor device analyzer
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Figure 3-22
B1500A/MFCMU
N1300A
+ BNC-T adapters
High
Low
to CML
to CMH
B2200A with B2210A or
B2201A with B2211A or
E5250A with E5252A
Installation
Capacitance Compensation When Using Switching Matrix
In
Figure
3-22, C1 (DATA04), C2H (DATA05), C2L (DATA06), C3H (DATA07),
C3L (DATA08) are the compensation coefficients defined in the compensation data
file. where, CxH is for the path connected to the MFCMU Hc-Hp terminal, and CxL
is for the path connected to the MFCMU Lc-Lp terminal.
When Keysight B2220A probe card interface is used, obtain the coefficients for
C3x, and create your compensation data file. In this case, probe card will be used for
the C3x path.
When the connector plate is used, obtain the coefficients for C2x and C3x, and
create your compensation data file. In this case, triaxial cable with connector plate
will be used for the C2x path. And coaxial cable with positioner will be used for the
C3x path.
For obtaining the compensation coefficients and creating the compensation data file,
see
"To Create Compensation Data File" on page
Extension Cables and Compensation Coefficients
Case 1. Probe card interface
16494A/C
(C1, DATA04, fixed)
Case 2. Connector plate
16494A/B
(C1, DATA04, fixed)
B2210A outputs or
B2211A outputs or
E5252A outputs
3- 52
Perform open calibration at this plane.
Short calibration is optional.
C2H, C3H, DATA05, DATA07: for CMH path
C2L, C3L, DATA06, DATA08: for CML path
B2220A (C2H, DATA05, need update)
16495F/G
Extended triaxial
cables
with connector plate
(C2H, DATA05, need update)
(C2L, DATA06, need update)
Keysight B1500A User's Guide, Ed ition 14
3-53.
(C2L, DATA06, need update)
Case 1 is not available
for E5250A.
Probe card etc.
(C3H, DATA07, need update)
(C3L, DATA08, need update)
Extended coaxial
cables and positioners
(C3H, DATA07, need update)
(C3L, DATA08, need update)

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