Keysight Technologies B1500A User Manual page 149

Table 4-1
Force
Range
resolution
25 V
±0.5 V
100 V
±2 V
250 V
±5 V
±20 V 1 mV
±40 V 2 mV
±100 V 5 mV
a. ±(% of output/measured value + offset value in mV)
b. 100 mA (Vo  20 V), 50 mA (20 V < Vo  40 V), 20 mA (40 V < Vo), Vo is the output voltage.
Table 4-2
Force
Range
resolution
b 1 fA
±1 pA
c 5 fA
±10 pA
c 5 fA
±100 pA
±1 nA 50 fA
±10 nA 500 fA
±100 nA 5 pA
±1 A
50 pA
±10 A
500 pA
±100 A
5 nA
±1 mA 50 nA
±10 mA 500 nA
5 A
±100 mA
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
b. Applicable if Keysight E5288A Atto Sense and Switch Unit (ASU) is used.
c. Not applicable for the MPSMU without ASU.
d. 100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current.
Voltage range, resolution, and accuracy (high resolution ADC)
Measurement
resolution
0.5 V
2 V
5 V
20 V
40 V
100 V
Current range, resolution, and accuracy (high resolution ADC)
Measurement
Force accuracy ±(%+A+A)
resolution
0.1 fA
b
±(0.46+3E-14+VoE-17)
0.4 fA / 1 fA
b ±(0.3+1E-13+VoE-16)
0.5 fA / 2 fA
10 fA
±(0.1+3E-13+Vo1E-15)
10 fA
±(0.1+3E-12+Vo1E-14)
100 fA
±(0.05+3E-11+Vo1E-13)
1 pA
±(0.05+3E-10+Vo1E-12)
10 pA ±(0.05+3E-9+Vo1E-11)
100 pA
±(0.035+15E-9+Vo1E-10)
1 nA
±(0.04+15E-8+Vo1E-9)
10 nA ±(0.04+15E-7+Vo1E-8)
100 nA
±(0.045+15E-6+Vo1E-7)
Keysight B1500A User's Guide, Ed ition 14
Force accuracy
a
±(%+mV)
±(0.018 + 0.15)
±(0.018 + 0.4)
±(0.018 + 0.75)
±(0.018 + 3)
±(0.018 + 6)
±(0.018 + 15)
a
±(0.9+15E-15)
±(0.46+15E-15+Vo1E-17)
Specifications
Measurement accuracy
a
±(%+mV)
±(0.01 + 0.12)
±(0.01 + 0.14)
±(0.009 + 0.25)
±(0.009 + 0.9)
±(0.01 + 1)
±(0.012 + 2.5)
Measurement accuracy
a
±(%+A+A)
±(0.9+12E-15)
±(0.3+3E-14+Vo1E-16)
±(0.1+2E-13+Vo1E-15)
±(0.1+1E-12+Vo1E-14)
±(0.05+2E-11+Vo1E-13)
±(0.05+1E-10+Vo1E-12)
±(0.04+2E-9+Vo1E-11)
±(0.03+3E-9+Vo1E-10)
±(0.03+6E-8+Vo1E-9)
±(0.03+2E-7+Vo1E-8)
±(0.04+6E-6+Vo1E-7)
Hardware
Maximum
current
100 mA
100 mA
100 mA
100 mA
b
Maximum
voltage
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
d
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