Keysight Technologies B1500A User Manual page 168

Semiconductor device analyzer
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Specifications
Hardware
SCUU supplemental characteristics
SMU path
Offset current: < 20 fA
Offset voltage: < 100 V at 300 sec
Closed channel residual resistance: < 200 m
Channel isolation resistance: > 10
CMU path
Test signal
Signal output level additional errors (CMU bias, open load):
± 2 % (direct docking)
± 7 % (indirect docking)
Signal output level additional errors (SMU bias, open load):
± 5 % (direct docking,  10 kHz)
± 10 % (indirect docking,  10 kHz)
Output impedance: 50 , typical
Signal level monitor additional errors (open load):
± 2 % (CMU bias), direct docking
± 5 % (SMU bias), direct docking
± 7 % (CMU bias), indirect docking
± 10 % (SMU bias), indirect docking
DC bias function
DC voltage bias (CMU bias)
Range: 0 to ± 25 V
Resolution: 1 mV
Additional errors (for CMU bias): ± 100 V (open load)
DC voltage bias (SMU bias)
Range: 0 to ± 100 V
Resolution: 5 mV
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Keysight B1500A User's Guide, Ed ition 14

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