Keysight Technologies B1500A User Manual page 134

Table 3-10
Figure 3-23
Installation
Capacitance Compensation When Using Switching Matrix
To obtain compensation coefficients
Obtain the compensation coefficients as shown below.
1. Select the measurement frequency (Fmeas) used for the capacitance
measurement of a device under test (DUT), and set it to the MFCMU. The
coefficients must be measured at the same frequency.
2. Perform the MFCMU open calibration at the measurement terminal. Optionally,
perform short calibration if you want.
3. See Table 3-10 and
4. Connect the path/cable corresponding to C3H (DATA07) shown in
to the MFCMU. Then measure and record the R, L, and C values.
5. Connect the path/cable corresponding to C3L (DATA08) to the MFCMU. Then
measure and record the R, L, and C values.
6. If you use the connector plate, perform the following procedure.
a. Connect the path/cable corresponding to C2H (DATA05) to the MFCMU.
Then measure and record the R, L, and C values.
b. Connect the path/cable corresponding to C2L (DATA06) to the MFCMU.
Then measure and record the R, L, and C values.
R, L, C Measurement Conditions
Parameter
R
1 kHz to 5 MHz
L
C
a. R, L, C of all coefficients must be measured with the same frequency setting.
b. For triaxial cable, connect B to F directly, and measure L between A and E.
For coaxial cable, ignore E and F, and connect B to D directly, and measure
L between A and C.
Compensation Coefficient Measurement Terminals of Extended Cables
GUARD (C) GROUND (E)
FORCE or SENSE (A)
3- 56
Figure 3-23, and set the MFCMU.
Frequency
a
PARALLEL
Insulator
Triaxial Cable
Keysight B1500A User's Guide, Ed ition 14
Function Terminals

A and B
SERIES
see note
A and C
GROUND (F) GUARD (D)
FORCE or SENSE (B)
Figure 3-22
b