Exposure Unit Temperature Sensors
There are temperature sensors [5] near the f-theta lenses to monitor the temperature inside
the exposure unit.
The f-theta lenses are made of plastic. The magnification ratio of plastic lenses may vary
slightly with temperature. The CPU uses the feedback from these temperature sensors to
adjust the mirror positions during MUSIC calibration. This corrects color registration errors
on the ITB.
SM
CÓPIA NÃO CONTROLADA
6-59
CÓPIA NÃO CONTROLADA
Process Control
D014/D015/D078/D079