Removal Of The Pump - EBARA EV-A Series Instruction Manual

7.5 Removal of the Pump

Turn off the main switch on the pump and disconnect power cable before servicing. Do not
supply power before completion of service work.
Wiring work must be done by qualified workers.
Pump remains hot during and/or after operation. Avoid direct skin contact otherwise it may
cause burn. Keep combustible materials away from the product. Do not attempt to service
the product when it is hot.
Do not remove packaging covers during operation.
Do not lift the pump by your self. Lift the pump by hand with two (2) persons.
Do not use sling or the like to lift the pump as the handles are not designed to be used with
slings.
Follow the procedure below when removing the pump from facility.
1) Stop the pump and purge of the process gas with N
2) Stop supplying power and disconnect the power connector.
3) Remove the suction pipe and the outlet pipe, and seal the inlet port and the outlet port with blank
flange.
4) Packing
5) Use eyebolts(M8) and lift up the pump when load/unload the pump. (P.22)
PM10U
DANGER
WARNING
CAUTION
gas completely.
2
P.43
EBARA
CORPORATION