EBARA EV-A Series Instruction Manual page 38

P.38
1/4 tube
Fitting
Atmospheric
N2
Photo 6.1 Gas ballast specifications
Inlet Outlet
Gas ballast valve
Photo 6.2 The pump of which gas ballast valve is installed
1/4 tube
Fitting
Valve
Check
valve
Gas ballast valve Gas ballast valve
：Close ：Open
Fig. 6.1 How to open-and-close the gas ballast valve
EBARA
CORPORATION
PM10U