EBARA EV-A Series Instruction Manual page 4

P.4
<STORAGE OF THIS INSTRUCTION MANUAL>
This instruction manual describes important matters related to pump operation. Keep the manual in an
easy-to-see place so that it may be available whenever required.
＜Definitions of term＞
Definitions of term are as follows.
Solvent: IPA, Organic solvent such as Ethanol and etc.
Condensable gas: Water vapor or mixed gas with solvent.
Clean gas exhaust: Inert gas such as nitrogen, atmosphere (exhaust dry types of gas)
*These are one of the examples
*Regardless of the solvent kind and its amount, contact one of our sales offices before you start
operation. When you pump flammable chemical, including solvent stated above, always
introduce N2 through gas ballast system.
*To vacuum solvent and condensable gas, read P.17 3.3 Gas Ballast Mechanism and P.39 6.3
About The Gas Ballast Mechanism beforehand to handle correctly.
PM10U
EBARA
CORPORATION