EBARA EV-A Series Instruction Manual page 17

Dry vacuum pump

Table of Contents

P.17

Note 1) The gas ballast mechanism is an option.

Note 2) N2 supply pressure for N2 gas ballast mechanism

Note 3) Maximum water vapor pumping rate with gas ballast valve fully opened.

Note 4) Actual value may not be in the range depending on facility.

Note 5) This describes tolerable voltage range, and is not steady voltage.

Note 6) Do no use this product with over 250V even it is within the tolerable range.

Note 7) For more details about oversea safety standard, contact one of our sales offices listed in the

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EBARA

CORPORATION

PM10U

Table of Contents

Ev-a06 Ev-a06-1 Ev-a06-2 Ev-a06-3