Removal Of The Pump - EBARA EV-A03 Instruction Manual

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7.5 Removal of the Pump

Turn off the main switch on the pump and disconnect power cable before servicing. Do not
supply power before completion of service work.
Wiring work must be done by qualified workers.
Pump remains hot during and/or after operation. Avoid direct skin contact otherwise it may
cause burn. Keep combustible materials away from the product. Do not attempt to service
the product when it is hot.
Do not remove packaging covers during operation.
Do not lift the pump by your self. Lift the pump by hand with two (2) persons.
Do not use sling or the like to lift the pump as the handles are not designed to be used with
slings.
Follow the procedure below when removing the pump from facility.
1) Stop the pump and replace remaining gases completely with N2 gas.
2) Turn off power supply and disconnect the power cable.
3) Remove the inlet and the outlet pipe, and seal the inlet and the outlet port with blank flanges.
4) Packing
PM10U
DANGER
WARNING
CAUTION
EBARA
CORPORATION