EBARA EV-A Series Instruction Manual page 6

P.6
* This vacuum pump is intended to get a vacuum source for vacuum exhaust, maintenance of vacuum
condition, and a clean usage as a vacuum source for general industry. However, the above is not
applicable to the case where using this vacuum pump has been judged to be usable for a use other
than these by a previous arrangement with the user before purchase.
* When the use is going to change the process for using this vacuum pump or divert this pump to
another use, please consult our business offices listed in the back. It may be necessary to change
the specifications of the pump and peripheral units.
* Using this vacuum pump to the process where existing radiation is prohibited.
Don't use it to exhaust the combustible gas or the dangerous fumes for the human body, etc.
PM10U
APPLICATION OF THE VACUUM PUMP
DANGER
EBARA
CORPORATION