Pumping Performance - EBARA EV-A Series Instruction Manual

P.19

3.6 Pumping Performance

Gas ballast valve : ON Gas ballast valve : OFF
800
700
600
500
400
300
200
100
0
1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05
Pressure[Pa]
Note) The gas ballast mechanism is an option.
EBARA
CORPORATION
PM10U