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WARNING: TOPPLE HAZARD
Risk of injury or damage to equipment. If installing the vacuum system directly onto
the pumping system, the weight of the system must be no more than 10 kg and the
centre of gravity must be positioned laterally within the bounds of the base plate. If
this is not the case, the vacuum system must be supported to ensure that the
pumping system does not topple.
1.
The turbo pump can be securely fixed to the vacuum system via the inlet flange.
Make sure that the pump inlet and all components fitted to the pump inlet are
clean and dust-free. If the pump inlet is not kept clean, the pump down time may
be increased.
2.
If the pump has a CF flange, use the copper compression gasket supplied with the
pump and use a full complement of bolts to connect the inlet flange of the pump
to the vacuum system.
3.
If the pump has an ISO flange, use a minimum of four claw clamps (each torqued
to 10 Nm) to connect the inlet flange of the pump to the vacuum system.
Alternatively, use a rotatable collar and the combined inlet screen and trapped
O‑ring supplied with the pump to connect the inlet flange of the pump to the
vacuum system, use a full complement of bolts with the rotatable collar.
4.
All inlet flange bolts must be re-tightened once the system is under vacuum.
Ensure that no torques or other forces are transmitted to the pump from the
vacuum system or the associated pipelines.
4.7 Connect to the exhaust extraction system
WARNING: DANGEROUS GASES
Risk of injury or damage to equipment. Vent dangerous gases and gas mixtures safely.
Do not expose people to these gases. If pumping hazardous gases or vapours,
observe the safety recommendations of the supplier of the gas/vapour.
The exhaust system must be configured so that the maximum pressure at the pump
outlet does not exceed 0.5 bar gauge (1.5 bar absolute, 1.5 x 10
throughput.
1.
Make sure that the exhaust pipeline cannot become blocked.
2.
If using an exhaust isolation valve, make sure the pump cannot be operated with
the valve closed.
Note:
This section applies to E2M1.5 versions only.
D39595880_A
D39595880_A - Installation
Page 21
5
Pa) at full pump
10/2020 - ©Edwards Limited
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