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13. Do steps 10 through 12 again for each position in
Table 9.
Let the Product soak for 5 minutes after you move
TC2.
Table 9. Axial Uniformity Test
TC2 Position from Furnace Center
-30
-10
TC1
TC2
Difference
14. Calculate the temperature difference relative to the
center position for each position of TC2 in Table 9. and
record it in the table.
Difference
= (TC2
(x)
(x)
15. Calculate a gradient value for the 30 and -30 positions
of TC2 with:
Gradient
(x)
X = TC2 Position at 30 mm and -30 mm
16. Calculate the slope value with:
Slope = Gradient
17. Calculate the SKEW value with:
Note
(mm)
0
10
30
– TC1
) – ( TC2
– TC1
(x)
(0)
= TC2
– TC1
(x)
(x)
– Gradient
(+30)
(-30)
18. Table 10 shows the value for A at each of the
temperature setpoints.
Setpoint (°C)
19. Put the SKEW
front panel or RS-232 port. Table 11 is a list of
temperature setpoints and the RS-232 command and
front-panel name for the SKEW parameters.
Setpoint
)
(0)
(°C)
300
700
1000
1200
20. Let the Product soak for 60 minutes after you put in
the SKEW value.
Calibration Procedure for Tube Furnace
SKEW
= SKEW
+ A x (Slope)
n(new)
n(old)
Table 10. Skew Correction Values
300
700
1000
1200
value into the Product through the
n(new)
Table 11. SKEW Parameter
Parameter
RS-232 Command
SOUR:SENS:CAL:SKEW1
SOUR:SENS:CAL:SKEW2
SOUR:SENS:CAL:SKEW3
SOUR:SENS:CAL:SKEW4
Calibration Furnace
A Value
1.02
1.35
4.67
5.30
Front Panel
SKEW (300)
SKEW (700)
SKEW (1000)
SKEW (1200)
67
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