9118A
Users Manual
Prepare Test Equipment and Power
On
Set setpoint
Heat On
Test the stabiltiy
Take As Found Data
for stability
Pass/Fail
Pass
Calculate the uniformity
Take As Found Data for
axial uniformity
Fail
Pass/Fail
Calculate the difference
of +/- 30 mm
Set the unifomity align
parameter
62
Fail
Pass
Figure 24. Tube Furnace Calibration Flow Chart
Take As Found Data
for stability
Fail
Pass/Fail
Pass
Take As Found Data for
Axial Uniformity
Fail
Pass/Fail
Calculate the gradient
Set the gradient align
parameter
Take As Found Data
for stability
Fail
Pass/Fail
Pass
Take As Found Data
for Axial Gradient
Fail
Pass/Fail
Pass
Calculate the accuracy
Set the accuracy
parameter
Take As Found Data
for stability
Fail
Pass/Fail
Take As Found Data
for Accuracy
Fail
Pass/Fail
Pass
All
No
Calibration Point
Finished
Yes
Finished
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