Setup & Operation 2. Specifications
Cleanroom-model G6-***C
The following figure shows the additional parts and specifications for the Table Top
mounting Cleanroom-model when compared with the Standard-model in appearance.
Upper bellows
Lower bellows
20
Plate cover
(For static electricity
countermeasure)
Plate cover
(For static electricity
countermeasure)
Cover
for Table Top mounting surface
Exhaust port
G6 Rev.21