Prober Control Overview - Keithley 4200-SCS User Manual

Section 4: How to Control Other Instruments with the Model 4200-SCS
Figure 4-21
Sample wafer organization
Site or Die
or Reticle
Subsites or Test
Element Groups
Probe Pads
1
Subsite 1

Prober control overview

A probe station, like any other external instrument, is controlled by the 4200-SCS through user
modules. Basic system connections are illustrated in
, is provided with the 4200-SCS to facilitate prober control. This generic prober user library,
prbgen
developed and maintained by Keithley Instruments, allows KITE to control all supported probers in
the same manner. Therefore, KITE projects using
Keithley Instruments. Refer to
NOTE
4-16
Table 4-2
The information provided in this overview is a summary of the information provided in the
Reference Manual, Using a Probe Station, page
Return to
1
12
Subsite 2
Figure
will work with any prober supported by
prbgen
for the list of supported probers.
G-1.
Section Topics
Model 4200-SCS User Manual
Final
Product
Die
4-1. A library of user modules, called
4200-900-01 Rev. K / February 2017
12