Keithley 4200-SCS User Manual page 223

Semiconductor characterization system
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Model 4200-SCS User's Manual
Figure 3-96
SMU+PG2 channels was split to provide a total of five test signals to provide the
minimum necessary channels for the select pins (Bit Line Select, Bit Lines 1 and
2), to the pulse DUT (circled in blue), and the measure DUTs (circled in dashed
purple).
measurements on the three DUTs labeled Measure. The preferred connection
method for disturb testing, or any testing of a an array DUT, is to add a switch
matrix, as shown in
Figure 3-96
Flash direct DUT connections – Disturb testing
4200-SMU/
4210-SMU
4200-SMU/
4210-SMU
4200-SMU/
4210-SMU
4200-SMU/
4210-SMU
4205-PG2 #1
4205-PG2 #2
DUT Connections
Instrument Connectors
4200-900-01 Rev. K / February 2017
shows connections to an array test structure, where one of the four
Figure 3-96
allows for pulsing one DUT while performing disturb
Figure
Force
Force
Force
Force
Trigger OUT
Trigger IN
Chan 1
Chan 2
Trigger OUT
Trigger IN
Chan 1
Chan 2
Adapters
WL1 / Gate
WL2 / Gate
BL2 / Drain
PG: BL Select /
SMU: BL1
LEMO Triax Connector
SMA Connector
Return to
Section Topics
Section 3: Common Device Characterization Tests
3-97.
SMU & PG2
SMU only
Bit Line Select
PG2 only
5' (1.5 m)
BNC
SMU & PG2
5' (1.5 m) BNC
SMU & PG2
8" (20 cm)
4.25" (11 cm)
SMA Tee, male-female-male
LEMO Triax -to-SMA Adapter
SMA male to BNC female
Triax female to BNC female
5' (1.5 m) BNC
78" (2 m)
BL1
Triax
Bit Lines
WL1
Word Lines
Measure
WL2
WLn
Note: All interconnect on instrument
chassis are white SMA cables.
Cables from the instrument to
device are BNC coax, except for the
direct SMU4 connection, which is
black Triax. Use Triax to BNC
adapters if necessary to connect to
probe manipulators .
V
PGM
BL2
Pulse this
cell
3-117

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