1.0
1.1
General ........................................................... 6
1.2
Equipment ....................................................... 7
1.3
1.4
1.5
1.6
2.0
2.1
2.2
2.3
2.4
Vacuum Pump................................................ 12
2.5
2.6
2.7
2.8
2.9
2.10
2.11
3.0
INsTALLATIoN ............................................. 15
3.1
3.2
3.3
3.4
3.5
3.6
3.7
Vacuum Pump................................................ 18
3.8
3.9
3.10
3.11
3.12
3.13
3.14
3.15
3.16
3.17
4.0
4.1
4.2
4.3
4.4
4.5
5.0
5.1
5.2
5.3
5.4
5.5
4 PET Plus User Manual
TABLE OF CONTENTS
Page
6.0
6.1
7.0
7.1
7.2
7.3
7.4
7.5
7.6
7.7
7.8
7.9
7.10
7.11
7.12
7.13
7.14
7.15
8.0
9.0
9.1
9.2
9.3
9.4
9.5
9.6
10.0
10.1
10.2
10.3
10.4
10.5
10.6
10.7
11.0
11.1
11.2
11.3
11.4
11.5
11.6
12.0
12.1
12.2
12.3
12.4
Chip Size ....................................................... 56
Polymer Drier ................................................. 59
Chip Size ....................................................... 60
Page