EBARA EV-PA 250 Instruction Manual page 35

Dry vacuum pump
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No.
LCD
1
MP IPM
2
BP IPM
3
MP OVCUR
4
BP OVCUR
5
MP STEP
6
BP STEP
7
MP OLD
8
BP OLD
9
MP THRML
10
BP THRML
11
OV VOLT
12
PWR FAIL
13
COM ALM
EEPROM
14
ERROR
15
DRV WDT
(*1) When COM ALM occurs, the driver of pump will be free run automatically.
No.
LCD
1
PFC FAIL
2
FAN ERR
3
EEP WAR
(*2)
When EEP WAR occurs, the operation time is not saved to EEPROM.
The pump will not start when a WARNING has been generated before starting.
PM10U
Description
MP IPM Trip
BP IPM Trip
MP over current
BP over current
MP step out
BP step out
MP overload
BP overload
MP temterature high
BP temperature high
Over voltage of driver
Power failure
Inner com. error
EEPROM ERROR at CP ON
Watchdog error(driver)
Description
PFC error
Cooling Fan error
EEPROM error
Table 4.2 ALARM list
Pump status
Condition for recovery
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
MP/BP STOP
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
MP/BP STOP
Corrective action and reset
LCD display
ERROR
MP/BP STOP
Table 4.3 WARNING list
Pump status
PUMP RUN
PUMP RUN
PUMP RUN
Reset the ALARM
Reset the ALARM
Clear the memory at
The factory
CP ON again
Condition for recovery
PFC recovery
FAN recovery
CP ON again
EBARA
35
P.
Remark
(*1)
At CP ON
remark
(*2)
CORPORATION

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