22
P.
2.3.3 Performance Curve
1000
100
10
1
0.1
1000
100
10
1
0.1
PM10U
1
10
Fig 2.1 EV-PA250 Performance Curve
(Dashed line: Gas ballast setting)
1
10
Fig 2.2 EV-PA500 Performance Curve
(Dashed line: Gas ballast setting)
100
1000
Inlet Pressure(Pa)
100
Inlet Pressure(Pa)
10000
1000
10000
EBARA
100000
100000
CORPORATION