Performance Curve - EBARA EV-PA 250 Instruction Manual

Dry vacuum pump
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22
P.

2.3.3 Performance Curve

1000
100
10
1
0.1
1000
100
10
1
0.1
PM10U
1
10
Fig 2.1 EV-PA250 Performance Curve
(Dashed line: Gas ballast setting)
1
10
Fig 2.2 EV-PA500 Performance Curve
(Dashed line: Gas ballast setting)
100
1000
Inlet Pressure(Pa)
100
Inlet Pressure(Pa)
10000
1000
10000
EBARA
100000
100000
CORPORATION

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Ev-pa 500

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