4
P.
Foreword
Design of EBARA EV-PA series DRY VACUUM PUMP is based on superior engineering and long
experience.
important to thoroughly understand this EBARA EV-PA series DRY VACUUM PUMP by careful study of
this manual. If any questions arise regarding this manual, please direct them to EBARA or your dealer.
Your questions will be promptly answered and your suggestion may be considered for incorporation into
our future products.
The design, specification and appearance are subject to change without prior notice
!
Before using this equipment, read this INSTRUCTION MANUAL thoroughly.
Manufactures warranty will be void, if the EV-PA series DRY PUMP has been
incorrectly installed, operated or maintained or if it has been modified or
repaired with parts not specified by manufacture.
EBARA is not liable for any injury or damage arising from an individual's
carelessness, or misuse.
PM10U
To prevent any possible trouble and provide satisfactory operation and long life, it is
WARNING
EBARA
CORPORATION