Overhaul - Edwards STP Series Instruction Manual

6.4

Overhaul

Deterioration or abrasion of the internal parts of the STP pump will cause a failure.
The recommended maintenance intervals for different process applications are tabulated below:
Process
Metal Etch Process
(deposition)
Other Etch Processes
It is recommended to change the pump rotor after 5 years due to accumulated wear of the
protective plating material
Other semiconductor process
Clean applications
(Only vacuum pumping)
Other use
*1
"Etching" includes semiconductor etching and LCD etching.
Note: The rotor blade and the touch down bearing inside the STP pump will be worn out and lose
their function by continual operation. When the STP control unit displays "w" or "Warning", it
is essential to have the touch down bearings replaced.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at
the customers charge.
When overhaul of the STP pump is needed, contact Service office.
March 10
STP Series Turbomolecular Pump
Period
1 year Processes resulting in large amount of deposits in
the pump will require more frequent service.
2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
5 years No gases used. (Only vacuum pumping)
2 years Dependent on application, contact Edwards.
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Remarks
Issue 1-b
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