Edwards STP Series Instruction Manual page 17

Item Description
1 Inlet port flange
2 TMS sensor connector
3 Cooling water port
(water cooling unit)
4 Outlet port flange
5 STP connector
*4
6 Purge port
The STP pump in Figure 9 is a typical pump model. Refer to the STP Pump Instruction Manual (B).
*1
Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
*2
Depending upon the pump model, the TMS sensor is built in the STP pump. Refer to the STP Pump Instruction Manual (B)
for more detailed information.
*3
Depending upon the pump model, the STP pump is not equipped with water cooling unit. Refer to the STP Pump
Instruction Manual (B) for more detailed information.
*4
Depending upon the pump model, the STP pump is not equipped with a purge port. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
March 10
STP Series Turbomolecular Pump
Connected to the vacuum equipment (at the high vacuum
side).
*1*2
A temperature sensor is attached for use with the TMS unit
only.
*3
Connected to the STP pump cooling water pipe. This port is
used when water cooling the STP pump or using the TMS
unit.
Connected to the inlet port side of the backing-pump.
Connected to the STP connection cable.
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this
port.
11
Function
1
Issue 1-b