Edwards STP-XH3203P Series Manuals

Manuals and User Guides for Edwards STP-XH3203P Series. We have 2 Edwards STP-XH3203P Series manuals available for free PDF download: Instruction Manual

Edwards STP-XH3203P Series Instruction Manual (59 pages)

STP Series Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1.34 MB

Table of Contents
3
1 Introduction

7
- Scope and Definitions
  7
- Applied Standards
  8
- Limited Warranty
  8
  - Warranty Period
    8
  - Item Warranted
    8
  - Disclaimer
    9
  - Spare Parts
    9
- Precautions for Safe Operation of the STP Pump
  10
  - Usable Gases
    10
- Maintenance and Inspection Precautions
  11
- Labels
  11
  - STP Pump Installation Warning Label
    11
  - Hot Surface Warning Label
    11
  - Heavy Product Caution Label
    12
  - Connector Caution Label
    12
  - Caution Label
    12
  - TMS Heater Surface Caution Label
    13
  - Rotation Instruction Label
    13
- Operation Principle of the STP Pump
  14
  - Cross Sectional View of the STP Pump
    14
- Temperature Management System
  15
- Name of the STP Pump
  16
  - Configuration of the STP Pump (Typical Pump Model)
    16
2 Installation of the Stp Pump

19
3 Installation of the Stp Control Unit

33
- STP Control Unit
  33
  - Scu-800
    33
  - Scu-750
    34
  - Scu-1400
    34
  - Scu-1500
    35
  - Scu-1600
    35
- Cable Connection
  36
  - STP Connection Cable
    36
    
    SCU-1400/SCU-1500/SCU-1600 STP Connection Cable
    36
    
    SCU-750/SCU-800 STP Connection Cable
    36
    
    Power Cable
    37
    
    SCU-1400/SCU-1500/SCU-1600 Power Cable
    37
    
    SCU-750 Power Cable
    37
    
    SCU-800 Power Cable
    37
- How to Connect the Cables
  38
4 Operation

41
- Before Starting the STP Pump
  41
  - Tuning
    41
  - Operation of Vacuum System
    42
- Pump Operation
  42
  - LED Indication During Operation
    42
  - Starting the STP Pump after a Safety Function Operates
    43
- Gas Pumping, Cooling and Baking the STP Pump
  43
  - Gas Pumping
    43
  - How to Introduce a Purge Gas
    44
- Cooling the STP Pump
  44
  - Water-Cooling Method
    44
  - Air-Cooling Method
    45
- Baking the STP Pump
  45
- How to Use the TMS Unit
  46
  - Parameter Set Mode
    46
  - Starting/Stopping the TMS Unit
    46
    
    Temperature Control
    46
5 Safety Functions

47
6 Maintenance and Inspection

51
- Cleaning
  52
- Inspecting the Deposit
  52
- Overhaul
  53
- Transporting for Repair or Overhaul
  54
7 Storage and Disposal

55
- Storage of the STP Pump
  55
- Disposal
  56
  - Service, Spares and Accessories
    57
  - Introduction
    57
  - Spares
    57
  - Accessories
    58

Edwards STP-XH3203P Series Instruction Manual (63 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 1.47 MB

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Operation Principle of the STP Pump
14
Temperature Management System
15
Name of the STP Pump
16
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36
Scu-800
36
Scu-801
36
Scu-1600/1601
37
Scu-1601
37
Cable Connection
38
STP Connection Cable
38
Power Cable
39
How to Connect the Cables
40
Operation
43
Before Starting the STP Pump
43
Tuning
43
Operation of Vacuum System
44
Pump Operation
44
LED Indication During Operation
44
Starting the STP Pump after a Safety Function Operates
45
Gas Pumping, Cooling and Baking the STP Pump
45
Gas Pumping
45
How to Introduce a Purge Gas
46
Cooling the STP Pump
46
Water-Cooling Method
46
Air-Cooling Method
47
Baking the STP Pump
47
How to Use the TMS Unit
48
Parameter Set Mode
48
Starting/Stopping the TMS Unit
48
Temperature Control
48
Safety Functions
49
Power Failure
49
Operation after a Power Recovery
49
Abnormal State of Magnetic Bearing
50
Excessive Vibration
50
Motor Driver Overload
50
Overheating Inside the STP Pump
50
Overheating Inside the STP Control Unit
51
Overspeed
51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)
51
Maintenance and Inspection
53
Cleaning
54
Inspecting the Deposit
54
Maintenance
55
Recommended Overhaul Intervals
55
Standard Replacement Parts
55
Recommended Maintenance Intervals for Main Parts
56
Transporting for Repair or Overhaul
57
Storage and Disposal
59
Storage of the STP Pump
59
Disposal
60
Service, Spares and Accessories
61
Introduction
61
Service
61
Spares
61
Accessories
62

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Edwards STP-XH3203P Series Manuals

Edwards STP-XH3203P Series Instruction Manual (59 pages)

Table of Contents

1 Introduction

2 Installation of the Stp Pump

3 Installation of the Stp Control Unit

4 Operation

5 Safety Functions

6 Maintenance and Inspection

7 Storage and Disposal

Edwards STP-XH3203P Series Instruction Manual (63 pages)

Table of Contents

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