Air-Cooling Method; Baking The Stp Pump - Edwards STP Series Instruction Manual

4.4.2

Air-cooling method

When water-cooling is not available, use an air-cooling unit (optional accessory). Refer to the STP
Pump Instruction Manual (B) for installation and other details.
Note: The air-cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the air-cooling unit can be used for the
STP pump.
4.5

Baking the STP pump

The surfaces of the STP pump and its peripheral equipment will become extremely
The TMS unit and the baking heater cannot be used together at the same time.
To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment
and STP pump.
When baking the STP pump, always cool it to prevent overheating.
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or less (an optional baking heater is set to 110 °C
or less).
DO NOT introduce gases during baking, or this will prevent overheating.
To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump, run
the STP pump during baking.
March 10
STP Series Turbomolecular Pump
WARNING
hot. Never touch them with bare hands.
CAUTION
39
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Issue 1-b