Performance Specifications - Ulvac PMB100D Instruction Manual

Mechanical booster pump
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2.2 Performance Specifications

Model *1
50Hz
Maximum
pumping
speed
60Hz
50Hz
Maximum
suction
pressure
60Hz
50Hz
Maximum
allowable
differential
pressure
60Hz
Ultimate Pressure
*2
Allowable drive pressure
kW (poles)
HP (poles)
200V class
Motor
V
*3
Multiple
voltage
V
Oil *4
Oil quantity
Cooling method *5
Primary side
pressure
Cooling
Inlet/outlet
water
differential
pressure
Volume
Temperature*6
Inlet port
Outlet port
Dimension W x D x H
Weight Total *7
Standard roughing pump *8
Certification *12
Optional
Table. 3 Specifications
PMB100D
m3/hour
95
L/min
1580
m3/hour
115
L/min
1920
3
Pa
9.3×10
Torr
69
3
Pa
6.2×10
Torr
46
3
Pa
8.0×10
Torr
60
Pa
3
5.6×10
Torr
42
Pa
Torr
Pa
Torr
0.4(2)
0.54(2)
50Hz
200
60Hz
200 / 220
220~240 /
50Hz
380~415
208~240 /
60Hz
380~460
L
0.35
Air cooled
MPa
-
psi
-
MPa
-
psi
-
L/min
-
-
VG50
VF50
mm
267 x 576 x 180 321 x 685 x 260 362 x 784 x 320 417 x 970 x 340 520 x 1260 x 460
kg
26
VD40
Atmospheric pressure start type (Inverter) *10, 14, Lubrication oil *4
Horizontal exhaust direction type (PMB2400D only)
PMB300D
PMB600D
280
500
4670
8330
330
600
5500
10000
3
1.2×10
9
2
9.3×10
7
3
4.0×10
30
3
3.3×10
25
-1
4.0 x 10
-3
3.0 x 10
5
~ 1.0 x 10
  (atmospheric pressure start type)
~ 760   (atmospheric pressure start type)
0.75(2)
2.2(2)
1.0(2)
2.95(2)
200~240 / 380~415
200~240 / 380~460
ULVOIL R-42
0.7
1.5
Air cooled / Water cooled
2
VG80
VF80
51
82
VD60 *9
VD90 *9
CE / cTUVus
Surface treatment, Explosion proof motor *13, 14
Lubrication chamber evacuation,
6
YK11-0016-DI-002-08
PMB1200D
PMB2400D
1000
2500 / 2000
16700
41667 / 33330
1200
3100 / 2400
20000
51667 / 40000
2.0×10
3
1.3×10
8.0×10
10
15 / 6
1.5×10
3
1.1×10
6.7×10
8.2
11 / 5
3.5×10
3
7.3×10
5.6×10
54.7
26.3 / 42.1
3.0×10
3
6.0×10
4.7×10
45
22.6 / 35.3
-1
6.7 x 10
-3
5.0 x 10
3.7(2)
7.5(2)
4.96(2)
10(2)
-
-
1.9
4 (2.2 ※ 11)
0.3
43.5
0.05
7.25
3
5 - 30
VG100
VG200
VF200
115
VS650/
VS2401
PKS-070
3
/
2
3
/
2
3
/
3
3
/
3
260

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Pmb300dPmb600dPmb1200dPmb2400d

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