Ulvac PMB100D Instruction Manual page 46

700
600
500
400
300
200
100
0
0.1 1
Fig. 18 Pumping speed curves - MODEL PMB300D/600D
Water-cooled specification with inverter (optional)
※Rotational speed of the mechanical booster pump with inverter is 60Hz.
3500
3000
2500
2000
1500
1000
500
0
0.1 1
Fig. 19 Pumping speed curves - MODEL PMB1200D/2400D
Water-cooled specification with inverter (optional)
PMB300(60Hz)+VD60(60Hz)
PMB300(60Hz)+VD60(50Hz)
10 100
Pressure (Pa)
PMB1200(60Hz)+VS2401(60Hz)
PMB1200(60Hz)+VS2401(50Hz)
10 100
Pressure (Pa)
19
YK11-0016-DI-002-08
PMB600(60Hz)+VD90(60Hz)
PMB600(60Hz)+VD90(50Hz)
1000 10000
PMB2400(60Hz)+VS650(60Hz)
PMB2400(60Hz)+VS650(50Hz)
1000 10000
100000
100000