Ulvac PMB100D Instruction Manual page 26

YK11-0016-DI-002-08
Tables and Illustrations
Fig. 1 Warning Label 1 ............................................................................................................................... xi
Fig. 2 Warning Label 2 .............................................................................................................................. xii
Fig. 3 Warning Label replacement 1 ......................................................................................................... xii
Fig. 4 Warning Label replacement 2 ........................................................................................................ xiii
Fig. 5 Pumping mechanism of mechanical booster pump ......................................................................... 4
Fig. 6 ①Recommended connection diagram ............................................................................................ 9
Fig. 7 Recommended connection diagram(INV) ........................................................................................ 9
Fig. 8 Electrical wiring diagram ................................................................................................................ 10
Fig. 9 Terminal box internal wiring diagram ............................................................................................. 10
Fig. 10 Location of vacuum pump in host device ...................................................................................... 11
Fig. 11 Dimensional drawing PMB100D ................................................................................................... 12
Fig. 12 Dimensional drawing PMB300D................................................................................................... 13
Fig. 13 Dimensional drawing PMB600D................................................................................................... 14
Fig. 14 Dimensional drawing PMB1200D ................................................................................................ 15
Fig. 15 Dimensional drawing PMB2400D ................................................................................................ 16
Fig. 16 Pumping speed curves - MODEL PMB100D/300D/600D(Standard) ........................................... 18
Fig. 17 Pumping speed curves - MODEL PMB1200D/2400D(Standard) ................................................ 18
Fig. 18 Pumping speed curves - MODEL PMB300D/600D ...................................................................... 19
Fig. 19 Pumping speed curves - MODEL PMB1200D/2400D .................................................................. 19
Fig. 20 Pumping speed curves - MODEL PMB100D/300D/600D ............................................................ 20
Fig. 21 Pumping speed curves - MODEL PMB1200D/2400D .................................................................. 20
Fig. 22 Evacuation by mechanical booster pump (example) ................................................................... 22
Fig. 23 Lubrication to the Mechanical seal ............................................................................................... 28
Fig. 24 Gear rotation direction .................................................................................................................. 43
Fig. 25 Separate evacuation of lubricating chamber ................................................................................ 53
Fig. 26 Separate evacuation of lubricating chamber (example) ............................................................... 53
Fig. 27 PMB100D Optional attachment figure .......................................................................................... 56
Fig. 28 PMB300D Optional attachment figure .......................................................................................... 57
Fig. 29 PMB600D Optional attachment figure .......................................................................................... 58
Fig. 30 PMB1200D Optional attachment figure ........................................................................................ 59
Fig. 31 PMB2400D Optional attachment figure ........................................................................................ 60
Fig. 32 PMB2400D Optional attachment figure ........................................................................................ 61
Fig. 33 Dimensional drawing PMB2400D Horizontal exhaust model ....................................................... 62
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