Specifications; Cryo-U - Ulvac CRYO-U Series Instruction Manual

Cryopump Description
1.2

Specifications

Pumping speed（L/s）
Ultimate pressure (Pa)
Maximum throughput
( Pa･L/s)
Pumping capacity
( Pa･L)
Cooldown time ( min)
（50/60Hz）
Weight ( kg) (*1)
Refrigerator unit
(Cold head)
Compressor unit
Compressor unit for
multi-operation (*2)
Helium gas supply and
return connectors
Mounting position
(*1) Shows the weight of standard cryopump. The weight varies depending on the model.
(*2) Multi-operation with C30MVR compressor is possible up to two cryopumps among U12H,
U12HSP,U12HL.
In multi-operation, when one cryopump has already been cooled down and starts cooling down the
other cryopump later, the latter may take longer cool-down time than the time shown in the table above.
(*3) Mounting position may be restricted depending on a kind or quantity of captured gas.
(*4) The values in parentheses are of multi-operation.
1-2
Table 1-1

CRYO-U

Nitrogen
Hydrogen
Argon
Water
Argon
2.0 x 10
(1.3 x 10
Hydrogen 4.1 x 10
(2.6 x 10
Argon
2.1 x 10
Hydrogen 9.8 x 10
85/75
(100/90)
ULVAC CRYOGENICS INCORPORATED
®

Specifications

U12H U12HSP
4,000 4,100
6,000 6,000
3,300 3,400
9,500 9,500
The order of 10
3
2.0 x 10
3
) (*4) (1.3 x 10
2
4.1 x 10
2
(*4)
) (2.6 x 10
8
4.4 x 10
5
1.6 x 10
90/80
(*5)
(105/95)
40 42
R20/R20R/RM20
C30V/C30VR
C30MV/C30MVR
1/2 self-sealing couplings
Can be operated in any position(*3)
U12HL
4,000
6,800
3,300
9,500
-7
3 3
2.0 x 10
3 3
) (*4) (1.3 x 10 ) (*4)
2 2
4.1 x 10
2 2
(*4) (*4)
) (2.6 x 10 )
8 8
3.1 x 10
6 5
9.8 x 10
90/80
(*5) (*5)
(105/95)
40