Ulvac PMB100D Instruction Manual page 58

WARNING
CAUTION
Use the flange for connection between the pump Outlet and the piping.
MODEL
PMB100D
PMB300D
PMB600D
PMB1200D
PMB2400D
If the pipe connected to the outlet had a small diameter or attached
foreign substance inside, it might raise the pressure inside the pipe
and impair the pump operation. A caution shall be required. Mounting
a pressure gauge on the exhaust side of the auxiliary pump, when
the exhaust port pressure 0.03MPaG (0.3 kg / cm2 G) become (gauge
pressure) or more, please provided an interlock which the auxiliary
pump and the pump is stopped . In a state in which the auxiliary pump
is stopped, and to operate the pump, it will be the cause of the
internal pressure of the rising pump damage.
There is a risk that the pressure inside the Vacuum pump rises up to
cause break or oil leak of the casing or Oil level gauge resulting in
overload of the motor.
Wash sufficiently inside the Vacuum chamber, pipes, Vacuum valve
and so on to connect them to the Pump. If dirty unit were connected,
it would cause a trouble such like raise the ultimate pressure or
extend the depression time to the specified pressure. Wear a pair of
gloves to touch any vacuum section. Do not touch with the bare
hand.
Pay attention not to give damage to the Flange sheet face, Gasket
slot or gasket itself.
Use a pipe having bellows between the backing pump and outlet of
the Mechanical Booster Pump so as to avoid any direct load to the
Pump flange.
Do not connect directly the backing pump inlet with the outlet of the
Mechanical Booster Pump.
VG50
VG80
VG80
VG80
VG200
Flange at the pipe
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
31
YK11-0016-DI-002-08