Ulvac PMB100D Instruction Manual page 101

Trouble Causes
Motor rotation direction is
1
reverse.
The oil is not supplied by
the specified volume.
2
Foreign matter has
3 entered the pump.
Components inside the
Unusual
4
pump have burnt out.
sounds
make.
Coolant does not flow.
(Specified volume is not
5
flowing.)
Any sound (clattering)
6 synchronized with rotating
speed?
Is roaring machine noise
7
always heard?
Metal noise of high
8
frequency
Processing Method
Do the connection again to
correct the rotation direction.
Control the oil level.
Supply the oil by the specified
volume.
Conduct the overhaul.
(Replacement of the pump part)
Conduct the overhaul.
(Clean the pump to eliminate
foreign matter.
Conduct the overhaul.
Keep flowing the Coolant by the
specified volume.
Conduct the overhaul.
(Replacement of the pump part)
Conduct the overhaul. (Re-
adjust timing.)
Conduct the overhaul.
Replace bearing and gear.
Stop the Pump,
lubricate the Mechanical seal.
74
YK11-0016-DI-002-08
Reference
3.5
4
3.2
6.2.1
6.2.2
6.2.3
6.2.4
6.2.8
6.4
6.4
3.6
6
6.1
6.2.5
6.4
6.4
3.2.2