Ulvac PMB100D Instruction Manual page 100

Trouble
Are the Safety circuit such
as a MS (Magnetic Switch)
10 and MCCB (Molded Case
Circuit Breaker) normal?
Failure of components.
Run only by the Motor.
11 Is the Rotation and current
value correct?
Moisture or solvents were
12 sucked in, forming rust
inside the pump.
Components inside the
13
pump have burnt out.
The oil is not supplied by
the specified volume.
The pump
dose not
a. Oil flow to outside of
run.
b. Oil flow to inside of
14
c. Oil flow from mechanical
Pressure is over the
15 maximum pumping
pressure.
Rotors do not rotate by
16
inertia.
Causes
pump.
casing.
seal.
Processing Method
Check the Safety circuit and
replace.
Replace the Motor
Conduct the overhaul
(replacement of the Casing,
Rotor, Cover and so on.)
Conduct the overhaul.
Control the oil level.
Conduct the overhaul.
Supply the oil by the specified
volume.
a. Replace O-rings, etc.
b. Conduct the overhaul.
Replace Seal sleeves and
shaft seals
c. Drain out oil of the reservoir,
and it relubricates the cover
on the motor side.
or
If the oil pooled 0.15mL/Hour
or more, You need Replace
the Mechanical seal.
Check pressure on intake and
exhaust sides.
Check the backing pump.
Conduct the overhaul
73
YK11-0016-DI-002-08
Reference
3.5
3.5
6.2.8
6.4
6.4
3.2
6
6.1
6.2
6.3
6.4
2.2
6.4