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MS120A
Ulvac MS120A Manuals
Manuals and User Guides for Ulvac MS120A. We have
1
Ulvac MS120A manual available for free PDF download: Instruction Manual
Ulvac MS120A Instruction Manual (69 pages)
Dry Vacuum Pump
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.53 MB
Table of Contents
Safety Indications
4
Definition of Pictograms
4
Warning Label Types and Display Positions
5
Warning Label Types and Descriptions
5
Warning Label Display Position
6
Warranty Terms
7
Warranty Product
7
Warranty Period
7
Disclaimer
7
Response
8
Others(Warranty Terms
8
About this Manual
9
Applicable Model
9
Table of Contents
11
For Safety Use
15
Handling of this Machine
15
Acceptance/Transfer/Storage
16
Acceptance
16
Transfer
17
Storage
17
Installation/Operation
17
Disposal
18
Protective Device
18
Safety Measures and Waring Risk
18
Vacuum Pumping and Exhaust of Hazardous Gases or Substances
18
Transfer of Heavy Object
19
Electrical Shock
19
High Temperature
19
Ruptures
20
Leakage of High-Temperature Cooling Water
20
Safety Data Sheet
21
Product Overview
22
Application
22
Naming
22
Performance Curve
23
Pumping Speed
23
Power Consumption
23
Name and Function of Parts
24
Description of Controller
25
System Configuration
28
Installation
29
Before Installation
29
Responsibility for Work from Shipping to Startup
29
Storage Environment Requirements
30
Environmental Requirements for Installation and Operation
30
Unpacking
31
Precautions for Unpacking
31
Confirmation after Unpacking
31
Transfer
32
How to Hoist Using Crane
33
How to Transport Using Pallet Truck
34
Installation
35
Leveling
35
Earthquake Countermeasures
35
Piping and Wiring
37
Inlet/Exhaust Port Piping
37
Dedicated Silencer (Separately Packed)
38
Cooling Water Piping
39
Purge Gas
41
Drain
42
Electric Wiring
43
Wiring for Remote Control
45
Operation
48
Precautions on Operation
48
Preparation for Operation
50
Pre-Operation Check
50
How to Switch between LOCAL (Manual) and REMOTE (Remote)
50
How to Start/Stop
51
LOCAL Operation
51
REMOTE Operation
51
Monitor Display
52
How to Operate Monitor Display
52
Parameter List
53
U3: Alarm History
53
U4: Operation Monitor
54
Maintenance and Inspection
55
Daily Inspection
55
Inspection after Long-Term Storage
55
Overhaul
56
Notes on Transportation
56
Troubleshooting
57
Trouble with Basic Operation
57
Alarm Status and Measures
58
How to Restart the Pump after an Alarm
63
Specifications
64
Performance Specifications
64
External Dimensions
65
Appendix
66
Major Replacement Parts
66
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