Ulvac PMB100D Instruction Manual page 16

Mechanical booster pump
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YK11-0016-DI-002-08
①:Hazardous voltage.
②:Hot heating part present.
③:There is a risk of explosion.
④:Checkup after storage for a long period.
⑤:Installation location attention.
Fig. 4 Warning Label replacement 2
xiii

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Pmb300dPmb600dPmb1200dPmb2400d

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