Ulvac PMB100D Instruction Manual page 45

700
600
500
400
300
200
100
0
0.1 1
Fig. 16 Pumping speed curves - MODEL PMB100D/300D/600D(Standard)
3000
2500
2000
1500
1000
500
0
0.1 1
Fig. 17 Pumping speed curves - MODEL PMB1200D/2400D(Standard)
PMB100(50Hz)+VD40(50Hz)
10 100
Pressure (Pa)
PMB2400(60Hz)+PKS-070(60Hz)
PMB1200(50Hz)+VS2401(50Hz)
10 100
Pressure (Pa)
18
YK11-0016-DI-002-08
PMB600(60Hz)+VD90(60Hz)
PMB600(50Hz)+VD90(50Hz)
PMB300(60Hz)+VD60(60Hz)
PMB300(50Hz)+VD60(50Hz)
PMB100(60Hz)+VD40(60Hz)
1000 10000
PMB2400(50Hz)+PKS-070(50Hz)
PMB1200(60Hz)+VS2401(60Hz)
1000 10000
100000
100000