Ulvac PMB100D Instruction Manual page 67

Be sure to put in the Insert if you use any plastic made product such
as nylon tube. Such a tube is likely to cause deformation or get rigid
as secular distortion and might cause a water leakage.
Keep the environment that does not cause dew formation when the
cooling water temperature was lower.
CAUTION
The machine is designed not to cause any leakage under restricted
condition and demonstrated by the Leak test.
However, it still has a risk of leaking under any abnormal condition
other than specified, for example abnormal water pressure rise. In
such a case, the leakage shall remain unstopped unless the supply
from the system stops.
You should refrain from installing electrical equipment or wiring
beneath the Pump and on the floor around the Pump.
We recommend you to put the Leak sensor on the floor beneath the
Pump and engage it with the interlock system of the equipment.
CAUTION
Close the Coolant supply valve (HWSV) immediately you noticed the
leakage. Put the [Closed] tag onto the handle after having closed the
valve.
Put a Flow meter applicable to visually check the flow onto the
cooling water supply source to make it possible to check the flow.
The water included little impurities (ex. Industrial Water) is
recommended for cooling water.
Depending on the water quality, the inside wall of cooling water
tube is covered with water scale (CaCO3 etc.) and cooling water
flow rate may be decreased.
Cooling water tube is corroded by Chlorine ion (Cl-) and cooling
water leak may be caused.
In case of using pure water, cooling water leak may be caused by
metal component dissolution, too.
In these cases, the repair service may be for a fee.
CAUTION
Establishment: Japan Industrial Water Association
40
YK11-0016-DI-002-08