Ulvac PMB100D Instruction Manual page 103

Trouble
Not using the ULVAC
9
genuine oil.
New oil pump was just
10
entered.
11 Leak valve is open
Motor rotation direction is
The
12
reverse.
pressure
Casing inside and/or the
does not
Rotor surface is dirty / wet.
13
There are attached
decline, and
substances, or wet.
the pumping
Mechanical seal
speed is
14
Air leak
slow.
Is the ultimate pressure of
backing pump normal?
15 Pressure is over the
prescribed value of the
mechanical booster pump.
Coolant does not flow.
(Specified volume is not
16
flowing.)
1 Power interruption
The motor has a ground
2
fault.
The inverter
display is Excessive power supply
3
"ov" (Main
voltage
circuit
overvoltage)
.
4 Inverter failure
Deceleration time of
5
inverter is too short
Causes
76
Processing Method
Conduct the overhaul of the
Pump and replace the oil with
the ULVAC oil.
Perform no-load operation for a
while.
Close the valve.
Do the connection again to
correct the rotation direction.
Conduct the overhaul
（Cleaning, clearance
adjustment）
Replace the Mechanical seal.
Check the backing pump.
Replacement of the backing
pump.
Keep flowing the Coolant by the
specified volume.
Conduct the overhaul.
(Replacement of the pump part)
Check the power supply wiring.
Contact the ULVAC service
center.
Check the supplied voltage.
Reduce the voltage down to that
of the pump's power supply
specification.
Contact the ULVAC service
center.
Contact the ULVAC service
center.
YK11-0016-DI-002-08
Reference
3.2
6.2.1
6.2.2
6.4
-
2.6
3.5
6.2.8
6.4
3.2.2
6.4
2.2
2.2
3.6
3.5
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of this
manual
2.1
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Last page
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