Ulvac PMB100D Instruction Manual page 93

Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed by the vacuum
pump.
If the Pump was used to exhaust the toxic gas, the Pump oil as well
as the Pump unit shall become toxic. Pay a full attention.
DANGER
Read "1. 2" previously before starting lubrication.
Please obtain the latest version of Material Safety Data Sheet (SDS)
from our Sales Department.
Weal protective gears such as rubber gloves, protective goggle and
so on.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the SDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope
of guarantee as it might impair the pump performance and shorten
the life cycle.
CAUTION
To lubricate, be sure to stop running the Pump and return the
Mechanical booster inside to the atmospheric pressure.
Chamber containing the oil becomes vacuum during operation.
Taking off the plug during operation would cause a large leak and
give damage to the Pump unit.
Never fail to conduct the lubrication oil out gassing before
CAUTION
starting operation when lubricated a new the Mechanical booster
pump or left it a long time after lubrication.
Starting operation without out gassing might generate a lot of
bubbles and cause them flow in the Rotor chamber.
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YK11-0016-DI-002-08