Ulvac CRYOPUMP CRYO-U Series Manuals

Manuals and User Guides for Ulvac CRYOPUMP CRYO-U Series. We have 3 Ulvac CRYOPUMP CRYO-U Series manuals available for free PDF download: Instruction Manual

Ulvac CRYOPUMP CRYO-U Series Instruction Manual

Ulvac CRYOPUMP CRYO-U Series Instruction Manual (101 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.26 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Cryopump System
    27
  - Specifications
    28
  - Environmental Requirements
    28
- Cryo-U
  28
  - Environmental Specifications
    28
  - External Drawing of CRYO-U
    30
  - Major Components
    31
SECTION 2 Inspection

32
SECTION 3 Quick Installation

34
- Quick Installation
  34
- Quick Installation Process Flow
  35
SECTION 4 Installation

36
- Auxiliary Equipments Required
  36
  - Cryopump
    36
- Example of CRYO-U
  37
  - Cryopump Vacuum System
    37
  - Installation
    37
- Mounting the Cryopump to the Vacuum System
  38
- Connecting Roughing Pump
  40
- Connecting Purge Gas Line
  40
- Connecting Exhaust Pipe
  41
- Connecting Cooling Water Pipe
  42
- Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
  42
- Connecting the Cryopump to the Compressor Unit
  42
- Connecting Remote Wiring
  43
- Connecting Electrical Cables
  43
- Connecting Flexible Hoses
  44
- Prior to Startup
  46
- Rough Pumping
  46
- Pressure Buildup Test
  47
- Startup and Cooldown
  47
- Operation
  47
- Rough Pumping
  47
- Normal Operation
  48
- Crossover
  49
- Shutdown Procedures
  51
- Handling of Hazardous Materials
  51
SECTION 6 Regeneration

52
SECTION 8 Maintenance

64
- Scheduled and Unscheduled Maintenance
  64
- Consumables
  66
- Cleaning the Cryopump
  67
- Charging Helium Gas
  68
- Charging Helium Gas
  70
- Helium Circuit Decontamination
  71
- Disconnecting Flexible Hose
  72
- Connecting Flexible Hoses
  76
  - Troubleshooting
    78
  - Flexible Hose
    86
  - Conversion of Thermometer Readings
    88
  - Principle of Cryopump Operation
    90
Appendices

78
Service Network

98

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Ulvac CRYOPUMP CRYO-U Series Instruction Manual

Ulvac CRYOPUMP CRYO-U Series Instruction Manual (103 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.32 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Cryopump System
    27
  - Specifications
    28
  - Environmental Requirements
    29
  - External Drawing of CRYO-U
    30
- Cryo-U
  30
  - Cryopump
    30
  - Major Components
    31
SECTION 2 Inspection

33
- 2.1 Shipping List
  33
- 2.2 First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
SECTION 4 Installation

37
- Auxiliary Equipments Required
  37
- Example of CRYO-U
  38
  - Cryopump Vacuum System
    38
  - Installation
    38
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  42
- Connecting Cooling Water Pipe
  43
- Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
  43
- Connecting the Cryopump to the Compressor Unit
  43
- Connecting Remote Wiring
  44
- Connecting Electrical Cables
  44
- Connecting Flexible Hoses
  45
- Prior to Startup
  47
- Rough Pumping
  47
- Pressure Buildup Test
  48
- Startup and Cooldown
  48
- Operation
  48
- Rough Pumping
  48
- Normal Operation
  49
- Crossover
  50
- Shutdown Procedures
  52
- Handling of Hazardous Materials
  52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- Cleaning the Cryopump
  68
- Charging Helium Gas
  69
- Charging Helium Gas
  71
Appendices

72
- Helium Circuit Decontamination
  72
  - A Troubleshooting
    72
  - B Flexible Hose
    73
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
  - C Conversion of Thermometer Readings
    89
  - D Principle of Cryopump Operation
    91
- Vapor Pressure of Various Kinds of Gas
  92
  - E Principle of Refrigerator Operation
    93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
  - F Dew Condensation
    97
Service Network

99

Ulvac CRYOPUMP CRYO-U Series Instruction Manual

Ulvac CRYOPUMP CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.52 MB

Table of Contents

Table of Contents

9
- Safety Instructions
  13
- Disposal Consideration
  25
- SECTION 1 Cryopump Description
  
  27
  - The General
    27
    
    Cryopump System
    27
  - Specifications
    28
    
    Cryopump
    28
  - Environmental Requirements
    29
    
    External Drawing of CRYO-U
    31
    
    Major Components
    32
- SECTION 2 Inspection
  
  33
  - 2.1 Shipping List
    33
    
    Shipping List for Cryopump Assembly
    33
    
    Shipping List for Cryopump System
    33
  - 2.2 First Inspection of Cryopump
    34
- SECTION 3 Quick Installation
  
  35
  - Quick Installation
    35
    
    Quick Installation Process Flow
    36
4. Installation

37
- SECTION 4 Installation
  37
  - Auxiliary Equipments Required
    37
  - Figure 1-1 Typical CRYO-U
    38
    
    Cryopump Vacuum System
    38
    
    Example of CRYO-U
    38
  - Installation
    38
    
    Examples of Cryopump Installation
    39
  - Mounting the Cryopump to the Vacuum System
    39
  - Connecting Roughing Pump
    41
  - Connecting Purge Gas Line
    41
    
    Pressure Loss of Regeneration Gas Purge PR Unit
    42
  - Connecting Exhaust Pipe
    42
    
    Connecting Flexible Hoses
    43
  - Connecting Cooling Water Pipe
    43
  - Connecting Remote Wiring
    44
  - Connecting Electrical Cables
    44
    
    Connecting Flexible Hoses
    45
5. Operation

47
- Operation
  48
- Pressure Buildup Test
  48
- Rough Pumping
  48
- Startup and Cooldown
  48
- Normal Operation
  49
- Crossover
  50
- Handling of Hazardous Materials
  52
  - 7.1 Disconnecting Flexible Hose
    61
  - Cryo-U
    61
    
    Disconnecting Flexible Hose
    62
    
    Charging Helium Gas
    71
    
    Vapor Pressure of Various Kinds of Gas
    92
    
    Principle of Refrigeration
    93
    
    Two-Stage Refrigerator
    96
- Shutdown Procedures
  52

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