Ulvac PMB100D Instruction Manual page 34

※1) No surface treatment (standard model). Optional surface treatment (Alumite) is available
(PMB***D-T model).
※2) Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by MacLeod
vacuum gauge.
※3) Either 200V class or multiple voltage motor is selectable. Multiple voltage motor is not
available with explosion proof motor.
※4) ULVOIL（R-72） is standard oil for air-cooled operation.ULVOIL（R-72）or fluorine oil (J25F) is
selectable as option.
The type of Vacuum pump oil differs depending on vapor pressure, viscosity, etc.
The use of a wrong type of oil can lower the pump performance.
So use the pump oil recommended ULVAC.Recommended type of oil: ULVOIL R-42 (standard oil),
※5) Air-cooled operation is possible in all pressure range in the case of inverter equipped type.
Specify the type when air-cooled operation is required. Air-cooled operation is not possible in
the case of the inverter for water-cooled operation. More than 1 hour operation in
300Pa~4000Pa range could be cause of damage in the case of the PMB600D, 1200D and
2400D. Select water-cooled type in that case.
※6) Make sure no condensation if cooling water temperature is low.
※7) Weight of D and DT model is same.
※8) Performance of these pumps could change depending on roughing pump. Above data is
based on standard roughing pump.
※9) Ultimate pressure is 0.67Pa in case standard roughing pump is GR series.
※10) It may cause inverter damage by vibration when the pump is directly mounted on the
roughing pump. Select the pump with inverter not equipped
※11) The value of the horizontal exhaust specification.
※12) Complied with cTUVus recognition when water cooling operation (except PMB100D) is
selected and optional inverter (atmospheric pressure operation) is not mounted from the
factory.
※13) Pressure proof explosion-resistant flange motor (d2G4) and increased safety explosion-
resistant motor (eG3) are selectable as option.
※14) It is not possible to select both explosion proof motor and atmospheric pressure start type
(inverter).
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YK11-0016-DI-002-08