6.4 Overhaul ......................................................................................................................................... 70
6.5 Trouble shooting ............................................................................................................................. 71
7. Removal / transport .............................................................................................................................. 81
7.1 Operation procedure ....................................................................................................................... 81
8. Disposal ................................................................................................................................................ 82
9. Warranty Clauses ................................................................................................................................. 83
9.1 Warrantable Items .......................................................................................................................... 83
9.2 Duration of guarantee ..................................................................................................................... 83
9.3 Warrantee scope ............................................................................................................................ 83
9.4 Response procedure ...................................................................................................................... 83
9.5 Disclaimer ....................................................................................................................................... 84
9.6 Others ............................................................................................................................................. 84
10. Main Displacement Parts ................................................................................................................... 85
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
Contents-3
YK11-0016-DI-002-08