Ulvac PMB100D Instruction Manual page 104

Trouble
Pressure is over the
1 maximum pumping
pressure.
The oil is not supplied by
the specified volume.
2
3 Oil is dirty.
Suction gas is hot.
4
Area around the Pump is
5
enclosed.
Abnormal
High temperature
6
heating
There is a leak in the pipe
7
connecting with the Pump.
Capacity of the backing
8
pump is short.
Coolant does not flow.
(Specified volume is not
9
flowing.)
Rotors do not rotate by
10
inertia.
Pressure on exhaust side
is high.
11
Causes
77
Processing Method
Check pressure on intake and
exhaust sides.
Check the backing pump.
Control the oil level.
Supply the oil by the specified
volume.
Replace with new oil.
Conduct the overhaul.
(Inside cleaning)
Install a cooling device such as
the Gas cooler on the suction
side.
Make the ventilation available.
Please use it in environment
with the air conditioning
Use a Leak detector or the like
to find out the leak position and
stop it.
Replacement of the backing
pump
Keep flowing the Coolant by the
specified volume.
Conduct the overhaul.
(Replacement of the pump part)
Conduct the overhaul.
Check the backing pump.
Check inside of the pipe is
connected to the mechanical
booster pump's outlet.
YK11-0016-DI-002-08
Reference
2.2
3.2
6.2.1
6.2.2
6.2.3
6.2.4
3.2
6.2.1
6.2.2
-
0.5.3
0.5.3
2.6
2.2
3.6
6
6.1
6.2.5
6.4
4