Ulvac CRYO-U Series Manuals

Ulvac CRYO-U Series Manuals

Manuals and User Guides for Ulvac CRYO-U Series. We have 10 Ulvac CRYO-U Series manuals available for free PDF download: Instruction Manual

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (106 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
Major Components
35
SECTION 2 Inspection
37
2.1 Shipping List
37
2.2 First Inspection of Cryopump
38
SECTION 3 Quick Installation
39
Quick Installation
39
Quick Installation Process Flow
40
Auxiliary Equipments Required
41
Example of CRYO-U
42
Cryopump Vacuum System
42
Installation
42
Mounting the Cryopump to the Vacuum System
43
Connecting Roughing Pump
45
Connecting Purge Gas Line
45
Connecting Exhaust Pipe
46
Connecting Cooling Water Pipe
47
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
47
Connecting the Cryopump to the Compressor Unit
47
Connecting Remote Wiring
48
Connecting Electrical Cables
48
Connecting Flexible Hoses
49
Prior to Startup
51
Rough Pumping
51
Pressure Buildup Test
52
Startup and Cooldown
52
Operation
52
Rough Pumping
52
Normal Operation
53
Crossover
54
Shutdown Procedures
56
Handling of Hazardous Materials
56
SECTION 6 Regeneration
57
The General
57
Regeneration Time
58
Warm-Up Method
58
Regeneration Flow Chart
60
Disconnecting Flexible Hose････････････････････････････7-1
65
Storage･･･････････････････････････････････････････････7-2
66
Disconnecting Flexible Hose
66
SECTION 8 Maintenance
69
8.1 Scheduled and Unscheduled Maintenance
69
8.2 Consumables
71
8.3 Cleaning the Cryopump
72
8.4 Charging Helium Gas
73
Helium Circuit Decontamination
76
A Troubleshooting
76
B Flexible Hose
77
Disconnecting Flexible Hose
77
Connecting Flexible Hoses
81
C Conversion of Thermometer Readings
93
D Principle of Cryopump Operation
95
Vapor Pressure of Various Kinds of Gas
96
E Principle of Refrigerator Operation
97
Principle of Refrigeration
97
Two-Stage Refrigerator
100
F Dew Condensation
101
Service Network
103

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Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- General
  27
- Specifications
  28
- Environmental Requirements
  29
- Major Components
  32
SECTION 2 Inspection

33
- 2.1 Shipping List
  33
- 2.2 First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
  - Auxiliary Equipments Required
    37
  - Installation
    38
SECTION 4 Installation

37
- Examples of Cryopump Installation
  39
- Connecting Flexible Hoses
  45
  - Prior to Startup
    47
  - Rough Pumping
    47
  - Pressure Buildup Test
    48
  - Startup and Cooldown
    48
  - Operation
    48
  - Rough Pumping
    48
  - Normal Operation
    49
- Cryopump Temperature Indication
  49
  - Crossover
    50
- Maximum Quantity of Sucked Gas Processable by Cryopump
  51
  - Shutdown Procedures
    52
  - Handling of Hazardous Materials
    52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- CRYO-U ® 22WB Consumables
  67
  - Cleaning the Cryopump
    68
  - Charging Helium Gas
    69
- Charging Helium Gas
  71
  - Helium Circuit Decontamination
    72
    
    A Troubleshooting
    72
    
    B Flexible Hose
    73
Appendices

72
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
- Operating Log
  85
  - C Conversion of Thermometer Readings
    89
  - D Principle of Cryopump Operation
    91
- Vapor Pressure of Various Kinds of Gas
  92
  - E Principle of Refrigerator Operation
    93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
  - F Dew Condensation
    97
- Dew-Point Temperature
  98
Service Network

99

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Cryopump System
    27
  - Specifications
    28
- Cryo-U
  28
  - Environmental Requirements
    29
  - External Drawing of CRYO-U
    30
    
    Cryopump
    30
SECTION 2 Inspection

33
- Shipping List
  33
- First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
SECTION 4 Installation

37
- Auxiliary Equipments Required
  37
- Example of CRYO-U
  38
  - Cryopump Vacuum System
    38
  - Installation
    38
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  42
- Connecting Cooling Water Pipe
  43
- Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
  43
- Connecting the Cryopump to the Compressor Unit
  43
- Connecting Remote Wiring
  44
- Connecting Electrical Cables
  44
- Connecting Flexible Hoses
  45
- Prior to Startup
  47
- Rough Pumping
  47
- Pressure Buildup Test
  48
- Startup and Cooldown
  48
- Operation
  48
- Rough Pumping
  48
- Normal Operation
  49
- Crossover
  50
- Shutdown Procedures
  52
- Handling of Hazardous Materials
  52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- Cleaning the Cryopump
  68
- Charging Helium Gas
  69
- Charging Helium Gas
  71
Appendices

72
- Helium Circuit Decontamination
  72
  - A Troubleshooting
    72
  - B Flexible Hose
    73
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
  - C Conversion of Thermometer Readings
    89
  - D Principle of Cryopump Operation
    91
- Vapor Pressure of Various Kinds of Gas
  92
  - E Principle of Refrigerator Operation
    93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
  - F Dew Condensation
    97
Service Network

99
- Major Components
  101

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Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
8-2 Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
SECTION 2 Inspection
33
2.1 Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose････････････････････････････7-1
61
Storage･･･････････････････････････････････････････････7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
Major Components
101

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
The General
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Cryo-U
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Major Components
31
SECTION 2 Inspection
33
2.1 Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Cryopump
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
SECTION 5 Operation
47
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose････････････････････････････7-1
61
Storage･･･････････････････････････････････････････････7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Specifications
    28
- Cryo-U
  28
  - Environmental Requirements
    29
  - External Drawing of CRYO-U
    31
  - Major Components
    32
SECTION 2 Inspection

33
- 2.1 Shipping List
  33
- 2.2 First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
SECTION 4 Installation

37
- Auxiliary Equipments Required
  37
  - Cryopump
    37
- Example of CRYO-U
  38
  - Cryopump Vacuum System
    38
  - Installation
    38
- Examples of Cryopump Installation
  39
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  42
- Pressure Loss of Regeneration Gas Purge PR Unit
  42
- Connecting Cooling Water Pipe
  43
- Connecting Remote Wiring
  44
- Connecting Electrical Cables
  44
- Connecting Flexible Hoses
  45
- Prior to Startup
  47
- Rough Pumping
  47
- Pressure Buildup Test
  48
- Startup and Cooldown
  48
- Operation
  48
- Rough Pumping
  48
- Normal Operation
  49
  - Cryopump System
    49
- Crossover
  50
- Shutdown Procedures
  52
- Handling of Hazardous Materials
  52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- Cleaning the Cryopump
  68
- Charging Helium Gas
  69
- Charging Helium Gas
  71
- Helium Circuit Decontamination
  72
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
APPENDIX A Troubleshooting

79
- Flexible Hose
  87
- Conversion of Thermometer Readings
  89
- Principle of Cryopump Operation
  91
- Vapor Pressure of Various Kinds of Gas
  92
- Principle of Refrigerator Operation
  93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
- Dew Condensation
  97
Service Network

99

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
The General
27
Specifications
27
Environmental Requirements
27
Typical CRYO-U
27
Cryopump System
27
External Drawing of CRYO-U
30
Major Components
31
SECTION 2 Inspection
33
2.1 Shipping List
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Cryo-U
37
Cryopump
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose････････････････････････････7-1
61
Storage･･･････････････････････････････････････････････7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (100 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
CHAPTER 1 Cryopump Description

27
- Typical CRYO-U ® Cryopump System
  27
  - Specifications
    28
- Cryo-U
  28
  - Environmental Requirements
    29
  - Environmental Specifications
    29
  - Major Components
    31
CHAPTER 2 Inspection

33
- Shipping List
  33
- Shipping List for Cryopump System
  33
- Shipping List for Cryopump Assembly
  33
- First Inspection of Cryopump
  34
- Quick Installation
  35
- Quick Installation Process Flow
  36
CHAPTER 3 Quick Installation

37
CHAPTER 4 Installation

37
- Auxiliary Equipments Required
  37
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  41
- Connecting Cooling Water Pipe
  42
- (Connecting Flexible Hoses)
  42
- Connecting Remote Wiring
  43
- Connecting Electrical Cables
  43
- Connecting Flexible Hose
  44
CHAPTER 5 Operation

45
- Prior to Startup
  45
- Rough Pumping
  45
- Pressure Buildup Test
  46
- Startup and Cooldown
  46
- Normal Operation
  47
- Cryopump Temperature Indication
  47
- Crossover
  48
- Shutdown Procedures
  49
- Maximum Quantity of Sucked Gas Processable by Cryopump
  49
- Handling of Hazardous Materials
  50
CHAPTER 6 Regeneration

51
- Regeneration Time
  52
- Warm-Up Method
  52
- Regeneration Flow Chart
  54
CHAPTER 7 Disconnection and Storage

59
CHAPTER 8 Maintenance

63
- Scheduled and Unscheduled Maintenance
  63
- Consumables
  65
- Cleaning the Cryopump
  66
- Charging Helium Gas
  67
- Charging Helium Gas
  69
- Helium Circuit Decontamination
  70
- Disconnecting Flexible Hose
  71
- Connecting Flexible Hoses
  75
  - Troubleshooting
    77
  - Flexible Hose
    85
  - Conversion of Thermometer Readings
    87
  - Principle of Cryopump Operation
    89
- Vapor Pressure of Various Kinds of Gas
  90
  - Principle of Refrigerator Operation
    91
- Principle of Refrigeration
  91
- Two-Stage Refrigerator
  94
  - Dew Condensation
    95
- Service Network
  97

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (102 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents

9
- Safety Instructions
  13
- Disposal Consideration
  25
- SECTION 1 Cryopump Description
  27
- The General
  27
- Cryopump System
  27
- Specifications
  28
- Environmental Requirements
  29
- External Drawing of CRYO-U
  30
- Shipping List for Cryopump System
  33
- Shipping List for Cryopump Assembly
  33
- 2.1 Shipping List
  33
- SECTION 2 Inspection
  33
- 2.2 First Inspection of Cryopump
  34
- SECTION 3 Quick Installation
  35
- Quick Installation
  35
- Quick Installation Process Flow
  36
4. Installation

37
- Auxiliary Equipments Required
  37
- Cryopump Vacuum System
  38
- Example of CRYO-U
  38
- Figure 1-1 Typical CRYO-U
  38
- Installation
  38
- Examples of Cryopump Installation
  39
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Purge Gas Line
  41
- Connecting Roughing Pump
  41
- Connecting Exhaust Pipe
  42
- Pressure Loss of Regeneration Gas Purge PR Unit
  42
- Connecting Cooling Water Pipe
  43
- Connecting Flexible Hoses
  43
- Connecting Electrical Cables
  44
- Connecting Remote Wiring
  44
- Connecting Flexible Hoses
  45
5. Operation

47
- Operation
  48
- Pressure Buildup Test
  48
- Rough Pumping
  48
- Startup and Cooldown
  48
- Normal Operation
  49
- Crossover
  50
- Handling of Hazardous Materials
  52
- Shutdown Procedures
  52
- 7.1 Disconnecting Flexible Hose
  61
- Cryo-U
  61
- Disconnecting Flexible Hose
  62
- Charging Helium Gas
  71
- Cryopump
  80
- Vapor Pressure of Various Kinds of Gas
  92
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
- Major Components
  101

Ulvac CRYO-U Series Instruction Manual

Ulvac CRYO-U Series Instruction Manual (26 pages)

Bakeable Type Cryopump

Brand: Ulvac | Category: Water Pump | Size: 0 MB

Table of Contents

Table of Contents
9
CHAPTER 1 Specifications

12
- Performance of Bakeable Type Cryopump
  12
- Sheath Heater
  12
- Specifications
  12
- Flange Specifcations
  13
- Cooling Water Pipe
  13
- Flange Specifications
  13
- Major Components
  14
CHAPTER 2 Installation

15
CHAPTER 3 Baking

19
- Outline
  19
- Baking Method
  20

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