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CRYO-U Series
Ulvac CRYO-U Series Manuals
Manuals and User Guides for Ulvac CRYO-U Series. We have
8
Ulvac CRYO-U Series manuals available for free PDF download: Instruction Manual
Ulvac CRYO-U Series Instruction Manual (106 pages)
CRYOPUMP
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.48 MB
Table of Contents
Table of Contents
9
Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
Major Components
35
SECTION 2 Inspection
37
2.1 Shipping List
37
2.2 First Inspection of Cryopump
38
SECTION 3 Quick Installation
39
Quick Installation
39
Quick Installation Process Flow
40
Auxiliary Equipments Required
41
Example of CRYO-U
42
Cryopump Vacuum System
42
Installation
42
Mounting the Cryopump to the Vacuum System
43
Connecting Roughing Pump
45
Connecting Purge Gas Line
45
Connecting Exhaust Pipe
46
Connecting Cooling Water Pipe
47
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
47
Connecting the Cryopump to the Compressor Unit
47
Connecting Remote Wiring
48
Connecting Electrical Cables
48
Connecting Flexible Hoses
49
Prior to Startup
51
Rough Pumping
51
Pressure Buildup Test
52
Startup and Cooldown
52
Operation
52
Rough Pumping
52
Normal Operation
53
Crossover
54
Shutdown Procedures
56
Handling of Hazardous Materials
56
SECTION 6 Regeneration
57
The General
57
Regeneration Time
58
Warm-Up Method
58
Regeneration Flow Chart
60
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
65
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
66
Disconnecting Flexible Hose
66
SECTION 8 Maintenance
69
8.1 Scheduled and Unscheduled Maintenance
69
8.2 Consumables
71
8.3 Cleaning the Cryopump
72
8.4 Charging Helium Gas
73
Helium Circuit Decontamination
76
A Troubleshooting
76
B Flexible Hose
77
Disconnecting Flexible Hose
77
Connecting Flexible Hoses
81
C Conversion of Thermometer Readings
93
D Principle of Cryopump Operation
95
Vapor Pressure of Various Kinds of Gas
96
E Principle of Refrigerator Operation
97
Principle of Refrigeration
97
Two-Stage Refrigerator
100
F Dew Condensation
101
Service Network
103
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Ulvac CRYO-U Series Instruction Manual (102 pages)
CRYOPUMP
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.25 MB
Table of Contents
Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
General
27
Specifications
28
Environmental Requirements
29
Major Components
32
SECTION 2 Inspection
33
2.1 Shipping List
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Installation
38
SECTION 4 Installation
37
Examples of Cryopump Installation
39
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Cryopump Temperature Indication
49
Crossover
50
Maximum Quantity of Sucked Gas Processable by Cryopump
51
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
61
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
CRYO-U ® 22WB Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
A Troubleshooting
72
B Flexible Hose
73
Appendices
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Operating Log
85
C Conversion of Thermometer Readings
89
D Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
E Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
F Dew Condensation
97
Dew-Point Temperature
98
Service Network
99
Ulvac CRYO-U Series Instruction Manual (102 pages)
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.42 MB
Table of Contents
Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Specifications
28
Cryo-U
28
Environmental Requirements
29
External Drawing of CRYO-U
31
Major Components
32
SECTION 2 Inspection
33
2.1 Shipping List
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
SECTION 4 Installation
37
Auxiliary Equipments Required
37
Cryopump
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Examples of Cryopump Installation
39
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Pressure Loss of Regeneration Gas Purge PR Unit
42
Connecting Cooling Water Pipe
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Cryopump System
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
61
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
APPENDIX A Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
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Ulvac CRYO-U Series Instruction Manual (102 pages)
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.68 MB
Table of Contents
Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
The General
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Cryo-U
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Major Components
31
SECTION 2 Inspection
33
2.1 Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Cryopump
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
SECTION 5 Operation
47
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
61
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
Ulvac CRYO-U Series Instruction Manual (102 pages)
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.71 MB
Table of Contents
Table of Contents
9
8-2 Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
SECTION 2 Inspection
33
2.1 Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
61
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
Major Components
101
Ulvac CRYO-U Series Instruction Manual (102 pages)
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.32 MB
Table of Contents
Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
The General
27
Specifications
27
Environmental Requirements
27
Typical CRYO-U
27
Cryopump System
27
External Drawing of CRYO-U
30
Major Components
31
SECTION 2 Inspection
33
2.1 Shipping List
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Cryo-U
37
Cryopump
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
61
Storage・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
Ulvac CRYO-U Series Instruction Manual (100 pages)
Brand:
Ulvac
| Category:
Water Pump
| Size: 3.36 MB
Table of Contents
Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
CHAPTER 1 Cryopump Description
27
Typical CRYO-U ® Cryopump System
27
Specifications
28
Cryo-U
28
Environmental Requirements
29
Environmental Specifications
29
Major Components
31
CHAPTER 2 Inspection
33
Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
First Inspection of Cryopump
34
Quick Installation
35
Quick Installation Process Flow
36
CHAPTER 3 Quick Installation
37
CHAPTER 4 Installation
37
Auxiliary Equipments Required
37
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
41
Connecting Cooling Water Pipe
42
(Connecting Flexible Hoses)
42
Connecting Remote Wiring
43
Connecting Electrical Cables
43
Connecting Flexible Hose
44
CHAPTER 5 Operation
45
Prior to Startup
45
Rough Pumping
45
Pressure Buildup Test
46
Startup and Cooldown
46
Normal Operation
47
Cryopump Temperature Indication
47
Crossover
48
Shutdown Procedures
49
Maximum Quantity of Sucked Gas Processable by Cryopump
49
Handling of Hazardous Materials
50
CHAPTER 6 Regeneration
51
Regeneration Time
52
Warm-Up Method
52
Regeneration Flow Chart
54
CHAPTER 7 Disconnection and Storage
59
Disconnecting Flexible Hose・・・・・・・・・・・・・・・・・・・・・・・・・・・・7-1
59
7.2 Storage
60
Disconnecting Flexible Hose
60
CHAPTER 8 Maintenance
63
Scheduled and Unscheduled Maintenance
63
Consumables
65
Cleaning the Cryopump
66
Charging Helium Gas
67
Charging Helium Gas
69
Helium Circuit Decontamination
70
Disconnecting Flexible Hose
71
Connecting Flexible Hoses
75
Troubleshooting
77
Flexible Hose
85
Conversion of Thermometer Readings
87
Principle of Cryopump Operation
89
Vapor Pressure of Various Kinds of Gas
90
Principle of Refrigerator Operation
91
Principle of Refrigeration
91
Two-Stage Refrigerator
94
Dew Condensation
95
Service Network
97
Ulvac CRYO-U Series Instruction Manual (26 pages)
Bakeable Type Cryopump
Brand:
Ulvac
| Category:
Water Pump
| Size: 0.96 MB
Table of Contents
Table of Contents
9
CHAPTER 1 Specifications
12
Performance of Bakeable Type Cryopump
12
Sheath Heater
12
Specifications
12
Flange Specifcations
13
Cooling Water Pipe
13
Flange Specifications
13
Major Components
14
CHAPTER 2 Installation
15
Fixing Sheath Heater
15
Connecting Sheath Heater to Power Source
15
Preparing Temperature Controllers for Baking and Overheat Protection
15
Connecting Cooling Water
17
Heat Insulation of Cryopump Surface
17
CHAPTER 3 Baking
19
Outline
19
Baking Method
20
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