Ulvac PMB100D Instruction Manual page 54

Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope
of guarantee as it might impair the pump performance and shorten
the life cycle.
CAUTION
To lubricate, be sure to stop running the Pump and return the
Mechanical booster inside to the atmospheric pressure.
Chamber containing the oil becomes vacuum during operation.
Taking off the plug during operation would cause a large leak and
give damage to the Pump unit.
CAUTION
Running the unit with the lubrication filled over the upper limit on
the room temperature (around 20℃) might cause the oil flowing in
the casing. Discharge the oil if over lubricated so as to match the
upper level.
Be sure to check the oil level under operation stop on the room
temperature (around 20℃.)
CAUTION
Oil level might get higher during operation due to the oil
temperature rise and oil rowing, but it makes no problem.
Note to purge the oil to transfer the pump. If forced to transfer
remaining the oil, be sure to keep the pump horizontal. Do not tilt
the pump 10 degree or more while you charge the oil. The oil might
run into the casing.
CAUTION
Be sure to lubricate the machine. If the lubrication oil came down
lower than limit level during operation, it might give damage on the
bearing, gear and shaft sealing and result in leak, noise, motor
overload and operation stop.
CAUTION
Oil for the mechanical booster pump is the same base of oil for the
backing pump.
CAUTION
Mechanical booster pump: ULVOIL R-42 (Mineral Oil)
Backing pump: ULVOIL R-72(Mineral Oil)
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YK11-0016-DI-002-08