Ulvac PMB100D Instruction Manual
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Ulvac PMB100D Instruction Manual

Mechanical booster pump
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INSTRUCTION MANUAL
MECHANICAL BOOSTER PUMP
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
Components Division
http://www.ulvac.co.jp/
PMB100D
PMB300D
PMB600D
PMB1200D
PMB2400D
1)
IE3 motor adoption
ULVAC, Inc.
YK11-0016-DI-002-09
1)
1)
1)
1)

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  • Page 1 YK11-0016-DI-002-09 INSTRUCTION MANUAL MECHANICAL BOOSTER PUMP PMB100D PMB300D PMB600D PMB1200D PMB2400D IE3 motor adoption Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC, Inc. Components Division http://www.ulvac.co.jp/...
  • Page 3 Declaration of Conformity...

  • Page 4: Before Using This Product

    The performance and safety of the product might not be ensured if any of the devices put together did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to guarantee performance and safety in such cases above. Any modification of the product by the user is out of the scope of guarantee by us and not be guaranteed in any manner.

  • Page 5: Safety Symbol Marks

    Division of ULVAC, Inc. agreed. It is prohibited to hand over and disclose this instruction manual to third parties without agreement by Components Division of ULVAC, Inc. 0.1 Safety Symbol Marks We display symbol marks regarding the safety in this manual and on the product to make clear items to observe.

  • Page 6: Safety Precautions

    YK11-0016-DI-002-08 0.3 Safety Precautions Descriptions are given as the method to keep away from danger and actions that must be restricted on the use of the product. Use of this product and this Instruction Manual. Please read this Instruction Manual before starting installation, operation check or maintenance of this product to use it in long term.
  • Page 7 YK11-0016-DI-002-08 We would be obliged to refrain from handling and/or executing maintenance of the product if the detail of used hazardous substance was not disclosed or the product has exhausted such substance that the detoxification process is hardly conducted. WARNING This Instruction Manual shall absolutely need to be delivered to the last user that uses the product.
  • Page 8 Pump. Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. PMB100D ： 26kg PMB300D ： 51kg PMB600D ： 82kg PMB1200D ： 115kg PMB2400D ：...
  • Page 9 YK11-0016-DI-002-08 Countermeasure to the earthquake There is a risk that the Pump lays down or slides and breaks peripheral units if it was not correctly fixed. Be sure to give allowances to the vacuum piping and electric cables so that they absorber vibrations to prevent them from breaking and/or dismantling.
  • Page 10 YK11-0016-DI-002-08 Wire size, please determined by considering the voltage drop of the wire. Typically, the voltage drop, please to be within 2% of the rated voltage of the motor. Voltage drop calculation： √ 3 × wire resistance (Ω / km) ×Wiring length (m) × motor rated WARNING current (A) ×...
  • Page 11 You have a risk of getting burned or fire caused by over heat. Ensure to flow the cooling water during operation. Required Cooling water shall be; Cooling water volume: PMB100D : air cooling PMB300D : 2 L/min or more PMB600D...
  • Page 12 Make airtight completely the Pump exhaust outlet with a blank flange. Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. PMB100D ： 26kg PMB300D ： 51kg PMB600D ： 82kg PMB1200D ： 115kg PMB2400D ：...

  • Page 13: Types And Descriptions Of Warning Labels Displayed On This Machine And Displayed Positions

    YK11-0016-DI-002-08 0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions Warning labels are attached on the warning locations in this system. Be sure to check them before starting operation of the Pump. Before use, read through the instruction manual and fully understand its contents.
  • Page 14 YK11-0016-DI-002-08 ※ PMB100D multi motor specification only Before starting the pump, check first that the connection is matched to used voltage. Refer to “3.5 Electrical Connection”. PMB100D PMB300D PMB600D Fig. 1 Warning Label 1...
  • Page 15 YK11-0016-DI-002-08 PMB1200D PMB2400D Fig. 2 Warning Label 2 This product can be used in compliance with the requirements of UL1450 "Standard for Motor-Operated Air Compressors, Vacuum Pumps, and Painting Equipment" by replacing the warning label according to the figure below. ①：Hazardous voltage.
  • Page 16 YK11-0016-DI-002-08 ①：Hazardous voltage. ②：Hot heating part present. ③：There is a risk of explosion. ④：Checkup after storage for a long period. ⑤：Installation location attention. Fig. 4 Warning Label replacement 2 xiii...

  • Page 17: Acceptance And Storage Of The Pump

    YK11-0016-DI-002-08 0.5 Acceptance and Storage of The Pump 0.5.1 Unpacking/Acceptance of the Pump This product is packed with the wooden frame. Please ask the special agency for dismantling it. Advise the dismantling agent to wear leather gloves and use appropriate tools such as pinch bar as they have a risk of cutting the hand by nail or chip.

  • Page 18: Transfer

    YK11-0016-DI-002-08 0.5.2 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. PMB100D ： 26kg PMB300D ： 51kg PMB600D ： 82kg PMB1200D ： 115kg PMB2400D ： 260kg...

  • Page 19: Ambient Condition For Storage, Install And Operation

    YK11-0016-DI-002-08 0.5.3 Ambient Condition for Storage, Install and Operation As precise clearances are provided with this machine, be sure to fulfill the following for its storage, install and operation; ① Ambient temperature and humidity for storage : -10°C to 50°C, less than 95%RH ②...
  • Page 20 Fix the pump horizontally so that there is not a wobble. Refer to “3.1 Storage/ Installation”, too. Model: PMB100D ① The connection of the pipe to the PMB 100Dserves as the installation of the pump. The pipe should be able to support the weight of the pump(example: the pipe is welded to the rack).
  • Page 21 YK11-0016-DI-002-08 Anti-vibration Model Foot print Bolt Rubber mount Kurashiki Kako., More than Ltd. PMB300D “M10 20mm” Model KLB-5030 The pump has four holes. The pump is fixed with four bolts. Kurashiki Kako., More than Ltd. PMB600D “M12 20mm” Model KLB-8030 The pump has four holes.

  • Page 22: Protective Device

    YK11-0016-DI-002-08 Please consider mounting arrangement of the pump, removal, inspection, cleaning and other tasks. 0.6 Protective Device This machine is equipped with the Three-phase AC motor. This motor is not equipped with the protective device. Put an overload protective device to connect through the motor with the Power Supply.

  • Page 23: Table Of Contents

    YK11-0016-DI-002-08 Table of Contents 0. Before Using This Product ........................i 0.1 Safety Symbol Marks ......................... ii 0.2 Meanings of Safety Symbol Marks ....................ii 0.3 Safety Precautions..........................iii 0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions ..x 0.5 Acceptance and Storage of The Pump ...................
  • Page 24 YK11-0016-DI-002-08 3.2 Lubrication ............................26 3.2.1 Lubrication to the Lubrication chamber..................26 3.3 Inlet port Piping ..........................29 3.4 Outlet port Piping ..........................30 3.5 Electrical Connection ........................32 3.6 Water Piping ........................... 39 4. Operation .............................. 41 4.1 Caution on Operation ........................41 4.2 Operation Start ..........................
  • Page 25 9.2 Duration of guarantee ........................83 9.3 Warrantee scope ..........................83 9.4 Response procedure ........................83 9.5 Disclaimer ............................84 9.6 Others ............................. 84 10. Main Displacement Parts ........................85 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination SERVICE CENTER Contents-3...
  • Page 26 Fig. 14 Dimensional drawing PMB1200D ....................15 Fig. 15 Dimensional drawing PMB2400D ....................16 Fig. 16 Pumping speed curves - MODEL PMB100D/300D/600D(Standard) ........... 18 Fig. 17 Pumping speed curves - MODEL PMB1200D/2400D(Standard) ..........18 Fig. 18 Pumping speed curves - MODEL PMB300D/600D ..............19 Fig.
  • Page 27 Table. 8 Optional parts ..........................53 Table. 9 Troubleshooting .......................... 71 Table. 10 Main displacement parts list for PMB100D ................85 Table. 11 Main displacement parts list for PMB300D ................86 Table. 12 Main displacement parts list for PMB600D ................87 Table.

  • Page 28: For Your Safety Use

    Getting injured on transferring There is a risk that the Pump might the pump Pump weight drop or lay down when attempted PMB100D ： 26kg unreasonable operation or machinery setup was not sufficient. PMB300D ： 51kg You are strictly restricted from entering PMB600D ：...

  • Page 29: Warning Explosion

    YK11-0016-DI-002-08 1.1.4 ! Warning Explosion Factors Avoidance methods and measures Ensured pressure value of the Pump is 0.03MPaG (0.3 kg/ cm G)(Gauge pressure). Check the Exhaust side pressure of the pump. If it was over 0.03 MPaG (0.3 kg/cm Pressure inside the pump rises up and (Gauge pressure) take away anything the pump explodes.

  • Page 30: Chemical Material Safety Data Sheet（Sds

    YK11-0016-DI-002-08 1.2 Chemical Material Safety Data Sheet（SDS） Chemical material used for this Pump; ・ULVOIL R-42 (Standard oil) The Chemical Material Safety Data Sheet introduces the chemical IMPORTANT material potential to use or touch on operating this machine. Please contact our Sales division if you are in need. Read it with attention to acknowledge the toxic characteristics described on the SDS.

  • Page 31: Pump Outline

    YK11-0016-DI-002-08 2. Pump Outline 2.1 Total configuration The Mechanical booster pump is used combined with the backing pump to enhance the exhaust speed around the pressure range 8.0×10 – 6.7×10 Pa where the backing pump exhaust speed is likely to lower. The mechanical booster pump includes two rotors having a cocoon-shaped cross section and a casing that encloses them.
  • Page 32 380～480V（50/60Hz） 380～460V（60Hz） ※1) Motor for PMB100D is IE3 unregulated. ※2) 200V in the multi-voltage counterparts motor (50Hz), 200V (60Hz), it can respond to 220V (60Hz). ＊There is not any naming for standard spec. Spec. H, F, T, TH or TF is selectable as option.

  • Page 33: Performance Specifications

    YK11-0016-DI-002-08 2.2 Performance Specifications Table. 3 Specifications Model *1 PMB100D PMB300D PMB600D PMB1200D PMB2400D m3/hour 1000 2500 / 2000 50Hz Maximum L/min 1580 4670 8330 16700 41667 / 33330 pumping m3/hour 1200 3100 / 2400 speed 60Hz L/min 1920 5500...
  • Page 34 The use of a wrong type of oil can lower the pump performance. So use the pump oil recommended ULVAC.Recommended type of oil: ULVOIL R-42 (standard oil), ※5) Air-cooled operation is possible in all pressure range in the case of inverter equipped type.
  • Page 35 YK11-0016-DI-002-08 Table. 4 Motor : class 200V for Japan ※15 Model PMB100D Motor Totally-Enclosed Fan-Cooled Flange Induction Motor 0.4　(2) kW　（poles） the connection inside delta(△) the terminal box 1.79A (200V-50Hz) RATED CURRENT 1.68A (200V-60Hz) RATED VOLTAGE 1.60A (220V-60Hz) Table. 5 Motor : Multi rated ※15, 16...
  • Page 36 YK11-0016-DI-002-08 cTUVus is, has been certified in the use of multi-voltage counterparts motor. When you use the pump in Quebec, Canada, French labels and instruction manual are necessary. Please contact beforehand. Use of inverter enables operation with intake pressure starting from atmospheric pressure.
  • Page 37 YK11-0016-DI-002-08 *Wire R, S, T to the primary side. *Wire U, V, W to the motor side. Fig. 8 Electrical wiring diagram △：Delta connection Y：Star connection Fig. 9 Terminal box internal wiring diagram Before wiring, please check the power supply voltage to be used. Check the power supply voltage to be used, please do the switching of the terminal box in the connection.

  • Page 38: System Flow

    YK11-0016-DI-002-08 2.3 System Flow Cooling water and power supply is required. And you prepare wiring, safety circuit and exhaust processing equipment, etc. *1 ： In the case of air cooling specification, it is unnecessary. Fig. 10 Location of vacuum pump in host device...

  • Page 39: Dimensional Drawing

    YK11-0016-DI-002-08 2.4 Dimensional drawing Fig. 11 Dimensional drawing PMB100D...
  • Page 40 YK11-0016-DI-002-08 Fig. 12 Dimensional drawing PMB300D...
  • Page 41 YK11-0016-DI-002-08 Fig. 13 Dimensional drawing PMB600D...
  • Page 42 YK11-0016-DI-002-08 Fig. 14 Dimensional drawing PMB1200D...
  • Page 43 YK11-0016-DI-002-08 Fig. 15 Dimensional drawing PMB2400D...

  • Page 44: Pump Performance

    YK11-0016-DI-002-08 2.5 Pump Performance 2.5.1 Ultimate Pressure The ultimate pressure of the mechanical booster pump change greatly depending upon the ultimate pressure of the backing pump. Special care is necessary when a backing pump other than the standard combination is used. If the ultimate pressure rises, it is necessary to measure the ultimate pressure of the backing pump, too.
  • Page 45 YK11-0016-DI-002-08 PMB600(60Hz)+VD90(60Hz) PMB600(50Hz)+VD90(50Hz) PMB300(60Hz)+VD60(60Hz) PMB300(50Hz)+VD60(50Hz) PMB100(60Hz)+VD40(60Hz) PMB100(50Hz)+VD40(50Hz) 1000 10000 100000 Pressure (Pa) Fig. 16 Pumping speed curves - MODEL PMB100D/300D/600D(Standard) 3000 PMB2400(60Hz)+PKS-070(60Hz) 2500 PMB2400(50Hz)+PKS-070(50Hz) 2000 1500 PMB1200(60Hz)+VS2401(60Hz) 1000 PMB1200(50Hz)+VS2401(50Hz) 1000 10000 100000 Pressure (Pa) Fig. 17 Pumping speed curves - MODEL PMB1200D/2400D(Standard)
  • Page 46 YK11-0016-DI-002-08 PMB600(60Hz)+VD90(60Hz) PMB600(60Hz)+VD90(50Hz) PMB300(60Hz)+VD60(60Hz) PMB300(60Hz)+VD60(50Hz) 1000 10000 100000 Pressure (Pa) Fig. 18 Pumping speed curves - MODEL PMB300D/600D Water-cooled specification with inverter (optional) ※Rotational speed of the mechanical booster pump with inverter is 60Hz. 3500 PMB2400(60Hz)+VS650(60Hz) 3000 PMB2400(60Hz)+VS650(50Hz) 2500 2000 PMB1200(60Hz)+VS2401(60Hz) 1500 1000...
  • Page 47 PMB100(60Hz)+VD40(50Hz) 1000 10000 100000 Pressure (Pa) Fig. 20 Pumping speed curves - MODEL PMB100D/300D/600D Air-cooled specification with inverter (optional) ※Rotational speed of the mechanical booster pump with inverter is 60Hz. ※Continuous operation in 300Pa ~ 4000Pa is within 1hr. 3500...

  • Page 48: Power Requirements

    YK11-0016-DI-002-08 ※Continuous operation in 300Pa ~ 4000Pa is within 1hr. 2.5.3 Power Requirements The power requirement of the mechanical booster pump varies with the intake pressure and the performance of the backing pump. With the standard backing pump, the motor is overloaded at an intake pressure of more than the maximum intake pressure (Refer to the “Table.

  • Page 49: Designing Pumping System

    YK11-0016-DI-002-08 2.6 Designing Pumping System The following is a short note of the knowledge required in using a mechanical booster pump. The mechanical booster pump cannot be started at the atmospheric pressure and must always be used in combination with a backing pump (dry pump/rotary pump). Therefore, the vacuum chamber and the piping must be rough-pumped by the methods shown in the “Fig.

  • Page 50: Automatic Operation

    YK11-0016-DI-002-08 2.7 Automatic Operation This pump has a certain operating pressure range. When starting it, therefore, it is necessary to monitor the vacuum gauge. In automatic operation, it is necessary to install a vacuum switch for pressure detection. When the pressure on the intake side becomes lower than the maximum intake pressure, the vacuum switch is actuated to start the mechanical booster pump.

  • Page 51: Motor Control Equipment (Water-Cooled Type With Atmospheric Pressure Operating Specification Inverter) (Optional)

    YK11-0016-DI-002-08 2.8 Motor control equipment (water-cooled type with atmospheric pressure operating specification inverter) (optional) Please refer to Section 5.4. For the operation of the controller and electrical wiring, refer to the instruction manual for the inverter. Troubles imputable to control by other than the standard controller and to change of setting are not covered by this warranty.

  • Page 52: Mounting

    YK11-0016-DI-002-08 3. Mounting You are requested to install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you use the product. Consequently you shall be requested to attend general safety lectures officially effective in the area, such as electrical safety, Cargo handling safety and so on.

  • Page 53: Lubrication

    YK11-0016-DI-002-08 3.2 Lubrication 3.2.1 Lubrication to the Lubrication chamber. Supply the lubrication oil by specified volume through the oiling port on the Gear cover (Refer to Fig.8- Fig.12 ). It takes approximately one minute that the lubrication oil fully spreads out. Check the oil volume by the Oil level gauge after the lubrication got stabled and add the oil if it was under the specified level as far as the oil gets stabled on the upper limit level.
  • Page 54 YK11-0016-DI-002-08 Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump performance and shorten the life cycle. CAUTION To lubricate, be sure to stop running the Pump and return the Mechanical booster inside to the atmospheric pressure.
  • Page 55 YK11-0016-DI-002-08 3.2.2 Lubrication to the Mechanical seal There is a mechanical seal inside the cover on the motor side. If you supply lubricant to the cover on the motor side, the mechanical seal is also lubricated. In order to prevent the oil shortage of the mechanical seal, when operating the pump after stopping the pump for more than 3 months or after having relocated the pump, be sure to lubricate to the mechanical seal.

  • Page 56: Inlet Port Piping

    YK11-0016-DI-002-08 3.3 Inlet port Piping Wash sufficiently inside the Vacuum chamber, pipes, Vacuum valve and so on to connect them to the Pump. If dirty unit were connected, it would cause a trouble such like raise the ultimate pressure or extend the depression time to the specified pressure.

  • Page 57: Outlet Port Piping

    Use the flange for connection between the pump Inlet and the piping. Provide a vacuum valve, vacuum gauge and vent valve between the vacuum chamber and pump, as shown in Fig. 12. MODEL Flange at the pipe PMB100D VF50 JIS B 2290:1998 PMB300D VF80 Vacuum technology-Flange dimensions;...
  • Page 58 Do not connect directly the backing pump inlet with the outlet of the Mechanical Booster Pump. Use the flange for connection between the pump Outlet and the piping. MODEL Flange at the pipe PMB100D VG50 PMB300D VG80 JIS B 2290:1998 Vacuum technology-Flange dimensions;...

  • Page 59: Electrical Connection

    WARNING PMB300D, 600D, 1200D, 2400D has adopted the IE3 motor. ※ PMB100D has adopted the IE2 motor. Striking current tends to be high because efficiency of IE3 motor is higher than conventional motor. Because of this consequence, there could be momentary operation by striking current of the motor in the...
  • Page 60 YK11-0016-DI-002-08 Turn OFF the Power Supply to do the electrical connection. Never try to work on it on keeping the electricity turned ON. A correct wiring work must observe the law and the rule that relates safely. A wrong wiring work might start a fire. The measures such as lockout/tag out should be executed not so as to turn the power switch by mistakes during working.
  • Page 61 1.2-1.5 R2-4 SW-03 Width across (220V-50Hz) (220V-50Hz) flat: 7mm 200V 1.69A 1.69A 1.4A-2.2A (240V-50Hz) (240V-50Hz) 1.61A 1.61A delta (208V-60Hz) (208V-60Hz) PMB100D AWG14 AWG14 2.5mm 2.5mm 1.52A 1.52A (220V-60Hz) (220V-60Hz) Motor : 1.47A 1.47A Multi rated (240V-60Hz) (240V-60Hz) 0.96A 0.96A (380V-50Hz)
  • Page 62 YK11-0016-DI-002-08...
  • Page 63 YK11-0016-DI-002-08 Rated Crimp-type Recommended Recommende Recommende Recommende connection Current Applicable Applicable Applicable terminal lug Magnetic MODEL MOTOR Speficication Breaker Thermal relay Terminal Terminal Screws Tightening Torque inside the (Voltage- Wire Gauge Wire Gauge Wire Gauge Wire Gauge Wire Gauge Wire Gauge motor starters terminal box Frequency)
  • Page 64 YK11-0016-DI-002-08 Rated Crimp-type Recommended Recommende Recommende Recommende connection Current Applicable Applicable Applicable terminal lug Magnetic motor MODEL MOTOR Speficication Breaker Thermal relay Terminal Terminal Screws Tightening Torque inside the (Voltage- Wire Gauge Wire Gauge Wire Gauge starters Wire Gauge Wire Gauge Wire Gauge terminal box Frequency)
  • Page 65 YK11-0016-DI-002-08...

  • Page 66: Water Piping

    Connect piping to the Cooling water inlet / outlet using care not to mistake the port. (Refer to Fig.8 ~ 12.) Cooling Cooling water MODEL Cooling water volume Connections method temperature PMB100D Air cooling PMB300D Water cooling 2Ｌ/min ≦ setting PMB600D Water cooling 2Ｌ/min ≦ setting Rc3/8 5℃...
  • Page 67 YK11-0016-DI-002-08 Be sure to put in the Insert if you use any plastic made product such as nylon tube. Such a tube is likely to cause deformation or get rigid as secular distortion and might cause a water leakage. Keep the environment that does not cause dew formation when the cooling water temperature was lower.

  • Page 68: Operation

    If any valve was put to a pipe after the Exhaust outlet, check and ensure that it is open. Ensure to flow the cooling water during operation. Required Cooling water shall be; Cooling water volume: PMB100D : air cooling PMB300D : 2 L/min or more PMB600D...

  • Page 69: Operation Start

    Check the lubrication oil level . Check the Cooling water. Ensure that the Cooling water is flowing. Check and ensure also that there is no cooling water leakage. Cooling water volume: PMB100D : air cooling PMB300D : 2 L/min or more PMB600D...

  • Page 70: Run

    YK11-0016-DI-002-08 Check the lubrication oil discharge operation and direction of rotation. Close the inlet valve of the Mechanical booster pump or put a Blind flange to the inlet port to block it. Run the backing pump to exhaust inside the Mechanical booster pump. This time, confirm that the pressure of the inlet or outlet of the booster pump comes down around the ultimate pressure of the backing pump (13.0-1.3Pa for the standard backing pump) and keep exhausting three minutes or more only by...

  • Page 71: Operation Stop

    YK11-0016-DI-002-08 4.3 Operation Stop Ensure to flow the cooling water with the specified volume. Lack of the cooling water might give damage to the Pump unit or evaporate the water remained in the Pump to raise the pressure inside the Cooling system resulting in accidentally jetting out the hot steam.
  • Page 72 YK11-0016-DI-002-08...

  • Page 73: Special Motors

    YK11-0016-DI-002-08 5. Option 5.1 Special motors The motor can be mounted explosion-proof increased safety explosion-proof motor is possible. For mounting dimensions, please contact us. The pump body is not explosion-proof. The combination of the inverter, motor explosion-proof increased safety explosion-proof motor can not accommodate. CAUTION 5.2 Inlet and outlet flange By attaching the adapter flange, you will be able to transform into various standard flange.
  • Page 74 YK11-0016-DI-002-08 activation by the pressure switch and timer. Inverter is CE approved marking · NRTL, with respect to installation conditions have been noted. Refer to the instruction manual of the inverter, please be prepared by the customer the necessary parts. CAUTION You will need to set up in a separate stand-alone inverter, construction noise and safety measures.
  • Page 75 YK11-0016-DI-002-08 Inverter type PMB100D PMB300D PMB600D PMB1200D PMB2400D Model number Voltage 200Vclass Inverter type CIMR-VA2A0006 CIMR-VA2A0006 CIMR-VA2A0012 CIMR-VA2A0020 CIMR-VA2A0040 Voltage 400Vclass Inverter type CIMR-VA4A0004 CIMR-VA4A0004 CIMR-VA4A0007 CIMR-VA4A0011 CIMR-VA4A0023 Control wiring for the inverter configuration and start-up (S1-SC), please do not change so we are at the time of shipment. Please...
  • Page 76 Parameter１８ AM Bias ※ 1: PMB100D has been set to "b1-01 = 0". When performing a main speed frequency reference analog input, Please set to "b1-01 = 1". PMB300,600,1200,2400D, please do not to "b1-01 = 0". It may cause malfunction.
  • Page 77 ※ 4) If you want to use a water-cooled specification, remove the short-circuit wiring of the "S2-SC", please the cooling water flowing prescribed amount.To PMB100D, it does not have this switching function. ※ 5) If you want to use the analog input command, please ON.
  • Page 78 Details of constants, please refer to the inverter instruction manual. If you are using a water-cooled specification, please cooling water flowing prescribed amount. It may cause pump damage (PMB100D, you do not have a water-cooled specification). Control wiring for the inverter configuration and start-up (S1-SC), please do not change so we are at the time of shipment.

  • Page 79: Motor Control Equipment (Air-Cooled Type With Atmospheric Pressure Operating Specification Inverter)

    PMB100D, which is air-cooled specification, short-circuit line of (S2- SC) is not required. Air-cooled specification control wiring diagram Please make sure that the short circuit wiring has been constructed between ※ "S2-SC" ※ PMB100D, the short-circuit line of but is air-cooled specification (S2-SC) is not required.

  • Page 80: Separate Evacuation Of Lubricating Chamber

    YK11-0016-DI-002-08 5.6 Separate Evacuation of Lubricating Chamber The oil flow from the lubricating chamber into the rotor chamber is reduced by the employment of a special shaft seal in the PMB-D series mechanical booster pumps. The oil flow can be minimized by evacuating the lubricating chamber by another vacuum pump.

  • Page 81: Preparation

    YK11-0016-DI-002-08 5.6.1 Preparation The separate exhaust port of the lubricating chamber is at the center of the oil trap flange (B) on the top on the motor-side cover. It is covered with a plug to keep off foreign matter on delivery. (1) Remove the plug from the separate exhaust port of the lubricating chamber.

  • Page 82: Operation

    YK11-0016-DI-002-08 5.6.7 Operation When the preparations for operation are completed, make a test run. Supply cooling water and put the pump into operation. The oil in the viewing window will bubble immediately after the start of pump operation, but the bubbles will soon disappear. During operation, check the following.

  • Page 83: Optional Attachment Figure

    YK11-0016-DI-002-08 5.7 Optional attachment figure Fig. 27 PMB100D Optional attachment figure...
  • Page 84 YK11-0016-DI-002-08 Fig. 28 PMB300D Optional attachment figure...
  • Page 85 YK11-0016-DI-002-08 Fig. 29 PMB600D Optional attachment figure...
  • Page 86 YK11-0016-DI-002-08 Fig. 30 PMB1200D Optional attachment figure...
  • Page 87 YK11-0016-DI-002-08 Fig. 31 PMB2400D Optional attachment figure ※ If you have installed the intake and exhaust ports ISO-F flange...
  • Page 88 YK11-0016-DI-002-08 Fig. 32 PMB2400D Optional attachment figure ※ If you have installed the inlet ISO-K flange...
  • Page 89 YK11-0016-DI-002-08 Fig. 33 Dimensional drawing PMB2400D Horizontal exhaust model...

  • Page 90: Maintenance And Check

    YK11-0016-DI-002-08 6. Maintenance and Check 6.1 Maintenance Conduct the maintenance regularly in appropriate check interval. Maintenance period shall differ depending on the operation purpose. Set the interval once a day at first. Once a week from next week if you had no problem, then conduct once a month for example. We recommend you, however, to conduct visual checks and check on the utility every day to see the system condition.

  • Page 91: Regular Check

    YK11-0016-DI-002-08 6.2 Regular Check Although you have to consider checkpoints depending on the use of the Pump, you should check the following regularly; it is helpful to avoid trouble and extend the pump life cycle. Check and ensure that any of hazardous energy is blocked before starting the operation.

  • Page 92: Pump Oil Level Check

    If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit may have collected on the bottom of the pump case. In that event, overhaul is required. Contact your local ULVAC organization or representative.
  • Page 93 SDS. CAUTION Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump performance and shorten the life cycle.

  • Page 94: Oil Leak Check

    YK11-0016-DI-002-08 6.2.3 Oil Leak Check The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit. Type of the seals and O-rings are listed at the end of this document. Please contact the Service Center close to you for purchase and repair.

  • Page 95: Checking The Noise And Abnormal Vibration

    YK11-0016-DI-002-08 6.2.7 Checking The Noise and Abnormal Vibration Checking around the pump Check whether bolts and nuts and the like fixing the pump are loose or not. Check whether pipes connected to the inlet/outlet are loose or not. Check and ensure that there is no leakage from the piping and valves. Checking the pump Please refer to the “6.5 Trouble check list.”...

  • Page 96: Checking The Coupling And Spider

    Meet the ratchet of both couplings and mount the motor in the pump. Put the bolts removed in the item (2) above. Recommended MODEL Bolt Q’ty tightening torque [N･m] PMB100D M6 x 14 5～10 PMB300D M8 x 22 15～20 PMB600D M8 x 22 15～20...

  • Page 97: Checkup After Storage For A Long Period

    YK11-0016-DI-002-08 6.3 Checkup after storage for a long period Long term storage of the Vacuum pump without operation might possibly cause trouble in operation caused by rust. If you kept the Pump long time without operating it, ask a closest Service Center for the check. 6.4 Overhaul If there found remarkable Pump contamination or performance deterioration due to the operation condition, you are recommended to conduct regular overhaul regardless of the check items...

  • Page 98: Trouble Shooting

    YK11-0016-DI-002-08 6.5 Trouble shooting Table. 9 Troubleshooting Trouble Causes Processing Method Reference Motor connection is wrong. Check the connection. Safety circuit such as a Make the Safety circuit conform MS (Magnetic Switch) is to the Motor specification. not correctly set. Oil viscosity got higher.
  • Page 99 YK11-0016-DI-002-08...
  • Page 100 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Are the Safety circuit such as a MS (Magnetic Switch) Check the Safety circuit and and MCCB (Molded Case replace. Circuit Breaker) normal? Failure of components. Run only by the Motor. Is the Rotation and current Replace the Motor value correct? Moisture or solvents were...
  • Page 101 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Motor rotation direction is Do the connection again to reverse. correct the rotation direction. The oil is not supplied by Control the oil level. the specified volume. Supply the oil by the specified 6.2.1 volume.
  • Page 102 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Pump exhaust capacity is smaller compared to the Select another Pump type. Vacuum chamber capacity. Pressure measurement Measure correctly the pressure. method is wrong. 2.5.1 Use the Vacuum gauge that matches the measurement Vacuum gauge is not pressure range and correctly appropriate.
  • Page 103 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Conduct the overhaul of the Not using the ULVAC 6.2.1 Pump and replace the oil with genuine oil. 6.2.2 the ULVAC oil. New oil pump was just Perform no-load operation for a entered. while.
  • Page 104 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Pressure is over the Check pressure on intake and maximum pumping exhaust sides. pressure. Check the backing pump. The oil is not supplied by Control the oil level. the specified volume. Supply the oil by the specified 6.2.1 volume.
  • Page 105 YK11-0016-DI-002-08...
  • Page 106 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Oil leaks to Deterioration of the O-ring 6.2.3 Conduct the overhaul. the outside of the Case and Cover. of the Oil inlet is loose. Tighten again the Oil inlet. pump. Foreign substance entered Conduct the overhaul. 6.2.8 inside the Pump impaired Removal of foreign substance...
  • Page 107 YK11-0016-DI-002-08 Trouble Causes Processing Method Reference Water leak Coolant joints and so on Check and repair Joints and outside got loose, or not tighten. so on. 6.2.5 the Pump. Are all three phases of power supply normal? Check the power supply. Abnormal phase voltage.

  • Page 108: Removal / Transport

    YK11-0016-DI-002-08 7. Removal / transport 7.1 Operation procedure Stop the pump, and set the inside of the pump to the atmospheric pressure. Shut the electricity supply and remove the cable connection. Remove the Cooling water piping. Discharge the lubrication oil. Remove the Suction/exhaust piping and put Blind flanges to the Pump inlet and outlet to seal them up.

  • Page 109: Disposal

    YK11-0016-DI-002-08 8. Disposal Make sure to keep in compliance with the laws and regulations established by the local governments to dispose the Vacuum pump. You should ask the dedicated disposal agency for the disposal particularly if the Pump has exhausted any toxic gas. Note that you are requested to bear the cost and charges relating to the disposal.

  • Page 110: Warranty Clauses

    9.4 Response procedure Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. or the local ULVAC representatives.

  • Page 111: Disclaimer

    9.6 Others In case, special agreement or memorandum for specifications is made individually. Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime, Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law.

  • Page 112: Main Displacement Parts

    YK11-0016-DI-002-08 10. Main Displacement Parts Table. 10 Main displacement parts list for PMB100D Location Descriotipn Specification Material Q'ty Seal sleeve For PMB100D SCM435H Rotor shaft of Power lock PL015-019E Driving side ※1 O ring Rotor shaft of Seal sleeve For PMB100D...
  • Page 113 YK11-0016-DI-002-08 Table. 11 Main displacement parts list for PMB300D Location Descriotipn Specification Material Q'ty Seal sleeve For PMB300D SCM435H Rotor shaft of Power lock PL022-026E Driving side ※2 O ring Seal sleeve For PMB300D SCM435H Rotor shaft of Power lock PL022-026E following movement side ※2...
  • Page 114 YK11-0016-DI-002-08 Table. 12 Main displacement parts list for PMB600D Location Descriotipn Specification Material Q'ty Seal sleeve For PMB600D SCM435H Power lock PL025-030E Rotor shaft of ※2 O ring Driving side ※2 O ring Seal sleeve For PMB600D SCM435H Rotor shaft of Power lock PL025-030E following movement side...
  • Page 115 YK11-0016-DI-002-08 Table. 13 Main displacement parts list for PMB1200D Location Descriotipn Specification Material Q'ty Seal sleeve For PMB1200D SCM435H Power lock PL030-035E Rotor shaft of ※2 O ring Driving side ※2 O ring Seal sleeve For PMB1200D SCM435H Rotor shaft of Power lock PL030-035E following movement side...
  • Page 116 YK11-0016-DI-002-08 Table. 14 Main displacement parts list for PMB2400D Location Descriotipn Specification Material Q'ty Seal sleeve For PMB2400D SCM435H Power lock PL038-044E Rotor shaft of ※2 O ring Driving side ※2 O ring Seal sleeve For PMB2400D SCM435H Rotor shaft of Power lock PL038-044E following movement side...
  • Page 117 This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
  • Page 118 ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.

This manual is also suitable for:

Pmb300dPmb600dPmb1200dPmb2400d

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