Ulvac PRC-003A Instruction Manual
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Ulvac PRC-003A Instruction Manual

Mechanical booster pump
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YO99-0874-DI-002-18
Instruction Manual
Mechanical Booster Pump
Model
PRC-003A
PRC-006A
PRC-012A
PRC-018A
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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Summary of Contents for Ulvac PRC-003A

  • Page 1 YO99-0874-DI-002-18 Instruction Manual Mechanical Booster Pump Model PRC-003A PRC-006A PRC-012A PRC-018A Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC, Inc. Components Division http://www.ulvac.co.jp/...
  • Page 2 The performance and safety of the product might not be ensured if any of the devices put together did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to guarantee performance and safety in such cases above. Any modification of the product by the user is out of the scope of guarantee by us and not be guaranteed in any manner.

  • Page 3: Safety Symbol Marks

    YO99-0874-DI-002-18 0.1 Safety Symbol Marks We display symbol marks regarding the safety in this manual and on the product to make clear items to observe. Descriptions attached to the symbol are classified as illustrated below; 0.2 Meanings of Safety Symbol Marks If the user makes a mistake in handling, it indicates an imminent possibility that the user is subject to death or heavy injury.

  • Page 4: Safety Precautions

    YO99-0874-DI-002-18 0.3 Safety Precautions Descriptions are given as the method to keep away from danger and actions that must be restricted on the use of the product. Use of this product and this Instruction Manual. Please read this Instruction Manual before starting installation, operation check or maintenance of this product to use it in long term.
  • Page 5 YO99-0874-DI-002-18 To export this product abroad, you have to clear the examination in accordance with the Foreign Exchange law, Foreign Trade law and relevant decree, ordinance and order. WARNING Please feel free to contact our sales office or agency closest to you or our Components Division.
  • Page 6 YO99-0874-DI-002-18 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. Be sure to use the loading machinery (such as mobile crane) to lift up the WARNING Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.
  • Page 7 Service Center for check and repair. ● Ensure to flow the Coolant during operation. Required Coolant volumes hall ▪ Coolant volume PRC-003A: 2.0 L/min or more PRC-006A: 2.0 L/min or more PRC-012A: 3.0 L/min or more CAUTION PRC-018A: 3.0 L/min or more...
  • Page 8 YO99-0874-DI-002-18 The water included little impurities (ex. Industrial Water) is recommended for cooling water. Depending on the water quality, the inside wall of cooling water tube is covered with water scale (CaCO etc.) and cooling water flow rate may be decreased. CAUTION Cooling water tube is corroded by Chlorine ion (Cl ) and cooling water leak may...

  • Page 9: Types And Descriptions Of Warning Labels Displayed On This Machine And Displayed Positions

    YO99-0874-DI-002-18 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. Be sure to use the loading machinery (such as mobile crane) to lift up the WARNING Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.
  • Page 10 YO99-0874-DI-002-18 PRC-003A PRC-006A PRC-012A PRC-018A Fig. 1 Warning Label...

  • Page 11: Acceptance And Storage Of The Pump

    YO99-0874-DI-002-18 0.5 Acceptance and Storage of The Pump 0.5.1 Unpacking/Acceptance of The Pump (1) This product is packed with the wooden frame. Please ask the special agency for dismantling it. Advise the dismantling agent to wear leather gloves and use appropriate tools such as pinch bar as they have a risk of cutting the hand by nail or chip.

  • Page 12: Transfer

    YO99-0874-DI-002-18 0.5.2 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. Be sure to use the loading machinery (such as mobile crane) to lift up the WARNING Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.

  • Page 13: Protective Device

    YO99-0874-DI-002-18 0.6 Protective Device This machine is equipped with the Three-phase AC200V 50/60Hz, AC220V 60Hz motor. This motor is not equipped with the protective device. Put an overload protective device to connect through the motor with the Power Supply. It is imperative to put the overload protective device under direction of the Electrical Installation Technical Standard (1965, Department of Trade and Industry decree No.

  • Page 14: Table Of Contents

    YO99-0874-DI-002-18 Table of Contents 0. Before Using This Product ........................i 0.1 Safety Symbol Marks ........................ii 0.2 Meanings of Safety Symbol Marks ....................ii 0.3 Safety Precautions ........................iii 0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions ..............................
  • Page 15 9.2 Duration of guarantee ........................ 52 9.3 Warrantee scope........................52 9.4 Response procedure ......................... 52 9.5 Disclaimer ..........................53 9.6 Others ............................53 10. Main Displacement Parts ......................54 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination SERVICE CENTER Contents-2...
  • Page 16 Table. 10 Optional parts........................ 37 Table. 11 Maintenance list ......................45 Table. 12 Troubleshooting ......................48 Table. 13 PRC-003A Main displacement parts list ............... 54 Table. 14 PRC-006A Main displacement parts list ............... 55 Table. 15 PRC-012A Main displacement parts list ............... 56 Table.

  • Page 17: For Your Safety Use

    (2) There is a risk that the Pump might drop or lay pump. down when attempted unreasonable operation Pump weight or machinery setup was not sufficient. You are PRC-003A : 51 kg strictly restricted from entering beneath the PRC-006A : 86 kg Pump. PRC-012A : 118 kg...

  • Page 18: Warning Electric Shock

    YO99-0874-DI-002-18 1.1.3 Warning Electric shock Factors Avoidance methods and measures (1) Be sure to cut the electricity to do electrical connection. Never fail to take the grounding. (2) Ensure to close the cover of motor terminal box and never open it during operation. Getting electrical shock on touching the current-carrying part of the (3) Be sure to cut the electricity to do checking or...

  • Page 19: Caution High Temperature

    YO99-0874-DI-002-18 1.1.5 Caution High temperature Factors Avoidance methods and measures (1) The Pump gets high temperature during operation. (2) As the surface temperature is high, you have a risk of getting burnt by accidentally touching it with the hand or the like. Refrain from touching the pump during operation.

  • Page 20: Chemical Material Safety Data Sheet（Sds

    YO99-0874-DI-002-18 1.2 Chemical Material Safety Data Sheet（SDS） Chemical material used for this Pump; (1) ULVOIL R-42(Mineral oil) Standard oil for our products is either ULVOIL R-42 its combined use is not allowed. IMPORTANT The Chemical Material Safety Data Sheet introduces the chemical material potential to use or touch on operating this machine.

  • Page 21: Pump Outline

    YO99-0874-DI-002-18 2. Pump Outline 2.1 Total configuration The Mechanical booster pump is used combined with the Supplementary pump to enhance the exhaust speed around the pressure range 1.3×10 - 1.3×10 Pa where the Supplementary pump exhaust speed is likely to lower. The mechanical booster pump includes two rotors having a cocoon-shaped cross section and a casing that encloses them.

  • Page 22: Performance Specifications

    YO99-0874-DI-002-18 2.2 Performance Specifications Table. 3 Performance specifications Item Model PRC-003A PRC-006A PRC-012A PRC-018A 1500/1800 ※ Maximum pumping speed 50/60 Hz (m 280/330 ※ 500/600 ※ 1000/1200 ※ Ultimate pressure (Pa) ※ 0.67 ※ 50Hz 1.2 x 10 1.3 x 10 1.3 x 10...

  • Page 23: System Flow

    YO99-0874-DI-002-18 2.3 System Flow Cooling water and power supply is required. And you prepare wiring, safety circuit and exhaust processing equipment, etc. Fig. 2 Location of vacuum pump in host device...

  • Page 24: Dimensional Drawing

    YO99-0874-DI-002-18 2.4 Dimensional drawing Fig. 3 PRC-003A Dimensional drawing...
  • Page 25 YO99-0874-DI-002-18 Fig. 4 PRC-006A Dimensional drawing...
  • Page 26 YO99-0874-DI-002-18 Fig. 5 PRC-012A Dimensional drawing...
  • Page 27 YO99-0874-DI-002-18 Fig. 6 PRC-018A Dimensional drawing...

  • Page 28: Pump Performance

    YO99-0874-DI-002-18 2.5 Pump Performance 2.5.1 Ultimate pressure The ultimate pressure of the mechanical booster pump varies with the ultimate pressure of the fore pump. If the ultimate pressure becomes high, it is necessary to check the ultimate pressure of the fore pump too.
  • Page 29 YO99-0874-DI-002-18 PRC-006A 60Hz PRC-006A 50Hz PRC-003A 60Hz PRC-003A 50Hz 1000 10000 100000 Pressure [Pa] Fig. 7 Pumping Speed（PRC-003A/006A） 2000 1800 PRC-018A 60Hz 1600 PRC-018A 50Hz 1400 1200 1000 PRC-012A 60Hz PRC-012A 50Hz 1000 10000 100000 Pressure [Pa] Fig. 8 Pumping Speed（PRC-012A/018A）...

  • Page 30: Power Consumption

    YO99-0874-DI-002-18 2.5.3 Power consumption If the intake pressure exceeds the maximum intake pressure (refer to “Table. 3 Performance specifications”) when the standard fore pump is used, the motor will be under overload and the pump will be overheated, leading to burnt motor or seized pump. Use a fore pump with which the difference in intake pressure between the mechanical booster pump and the fore pump is smaller than the maximum permissible difference pressure (pump having a higher performance than the standard fore pump in terms of pumping speed and ultimate pressure.

  • Page 31: Designing Pumping System

    YO99-0874-DI-002-18 2.6 Designing Pumping System The following is a short note of the knowledge required in using a mechanical booster pump. The mechanical booster pump cannot be started at the atmospheric pressure and must always be used in combination with a backing pump (dry pump/rotary pump). Therefore, the vacuum chamber and the piping must be rough-pumped by the methods shown in the “Fig.

  • Page 32: Automatic Operation

    YO99-0874-DI-002-18 2.7 Automatic Operation This pump has a certain operating pressure range. When starting it, therefore, it is necessary to monitor the vacuum gauge. In automatic operation, it is necessary to install a vacuum switch for pressure detection. When the pressure on the intake side becomes lower than the maximum intake pressure, the vacuum switch is actuated to start the mechanical booster pump.

  • Page 33: Setting Of Motor Controller (Atmospheric Pressure Actuating Type.with The Inverter. )

    YO99-0874-DI-002-18 2.8 Setting of Motor Controller (Atmospheric Pressure Actuating Type.With the inverter. ) Please refer to Section 5.4. For the operation of the controller and electrical wiring, ① refer to the instruction manual for the inverter. ② Troubles imputable to control by other than the standard controller and to change of setting are not covered by this warranty.

  • Page 34: Mounting

    YO99-0874-DI-002-18 3. Mounting You are requested to install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you use the product. Consequently you shall be requested to attend general safety lectures officially effective in the area, such as electrical safety, Cargo handling safety and so on.

  • Page 35: Lubrication

    Fig. 10 Oil level gauge Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump performance and shorten the life cycle.
  • Page 36 YO99-0874-DI-002-18 Oil for the mechanical booster pump is the same base of oil for the backing pump. Standard oil for our products is either ULVOIL R-42 ; its combined use is not allowed. CAUTION Be sure to refill the same oil as before. Running the unit with the lubrication filled over the upper limit on the room temperature (around 20 ℃...

  • Page 37: Inletportpiping/ Outlet Port Piping

    YO99-0874-DI-002-18 3.4 InletportPiping/ Outlet port Piping 3.4.1 Inlet port Piping ① Wash sufficiently inside the Vacuum chamber, pipes, Vacuum valve and so on to connect them to the Pump. If dirty unit were connected, it would cause a trouble such like raise the ultimate pressure or extend the depression time to the specified pressure.

  • Page 38: Outlet Port Piping

    PRC-003A/PRC-006A/PRC-012A/PRC-018A. (2) Do not connect directly the Supplementary pump inlet with the outlet of the PRC-003A/ PRC-006A/ PRC-012A/PRC-018A. ① Use of the toxic, combustible or combustion susceptible gas other than inactive gas is not allowed as there is a risk of leakage of the gas from the Pump unit if it was exhausted by the vacuum pump.
  • Page 39 YO99-0874-DI-002-18 ⑥ In the case of the process flowing combustible gas/susceptibility of substances to burn gas, you are requested to introduce the diluent gas. Flow the diluent gas from the intake side so that the gas concentration to be exhausted becomes lower than the explosion limit.

  • Page 40: Water Piping

    YO99-0874-DI-002-18 3.5 Water Piping Connect piping 9.52 mm in diameter or more to the Coolant inlet / outlet using care not to mistake the ports (Refer to Fig. 3～6.) (1) Be sure to flow the Coolant with the volume indicated on “Table.
  • Page 41 YO99-0874-DI-002-18 (1) The machine is designed not to cause any leakage under restricted condition and demonstrated by the Leak test. However, it still has a risk of leaking under any abnormal condition other than specified, for example abnormal water pressure rise. In such a case, the leakage shall remain unstopped unless the supply from the system stops.

  • Page 42: Electrical Connection

    Motor controller : refer to “APPENDIX 2 Option List” Table. 6 Rated current value of the PRC series standard motor Motor output Rated current value (A) Model (kW) 200V, 50Hz 200V, 60Hz 220V, 60Hz PRC-003A 0.75 PRC-006A PRC-012A 15.5 14.9 13.8 PRC-018A 22.0 21.0...
  • Page 43 YO99-0874-DI-002-18 Install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on. In the country and region you use the product. WARNING (1) Turn OFF the Power Supply to do the electrical connection. Never try to work on it on keeping the electricity turned ON.

  • Page 44: Operation

    (2) Check the lubrication oil level (Refer to “3.3 Lubrication”). (3) Check the Cooling water level (Refer to “3.5 Water Piping”). Ensure that the Cooling water is flowing. PRC-003A → Flow rate 2.0L/min or more PRC-006A → Flow rate 2.0L/min or more PRC-012A → Flow rate 3.0L/min or more PRC-018A →...
  • Page 45 ULVAC pump. There is a risk that the pressure inside the rises up as far as the Pump unit and/or Oil level gauge breaks or the Motor gets overloaded.

  • Page 46: Operation

    YO99-0874-DI-002-18 4.2 Operation 4.2.1 Exhaust start (1) Flow the Cooling water. (2) Close the main valve of the Mechanical booster pump and start running the Supplementary pump to exhaust inside pipes. (3) Start the operation upon the vacuum container was exhausted to the pressure lower than the maximum suction pressure of the Mechanical booster pump.
  • Page 47 YO99-0874-DI-002-18 To restart the Pump operation after once turned OFF the Power Supply, ensure to check that the Rotor is stopped to turn it ON again. Repeating turning ON/OFF the electricity supply to the Motor control CAUTION equipment in a short interval, particularly of the atmospheric pressure operation specification, might cause a trouble.

  • Page 48: Special Motors

    YO99-0874-DI-002-18 5. Option 5.1 Special motors The motor can be mounted explosion-proof increased safety explosion-proof motor is possible. For mounting dimensions, please contact us. The increased safety explosion-proof motor voltage explosion-proof motor, it can not respond. CAUTION Inlet and outlet flange By attaching the adapter flange, you will be able to transform into various standard flange.

  • Page 49: Setting Of Motor Controller (Atmospheric Pressure Actuating Type)

    YO99-0874-DI-002-18 considering the voltage drop. Wiring is long, please check the voltage drop across the wire, or conform to the following calculated value. If there is a risk of the voltage drop, please increase the size depending on the length of the cable wire. Motor rated voltage (V) ×...
  • Page 50 Setting of operating frequency (in Mitsubishi FR-E520 series and Mitsubishi FR-F520J series and Mitsubishi FR-D720 series) Operating frequency: 60 Hz Table. 7 Parameter setting: Mitsubishi FR-E520 series Parameter No. Parameter PRC-003A PRC-006A PRC-012A PRC-018A Electronic thermal O/L relay 15.1 21.0...
  • Page 51 YO99-0874-DI-002-18 Table. 8 Parameter setting: Mitsubishi FR-F520J series Parameter No. Parameter PRC-003A PRC-006A PRC-012A PRC-018A Communication check interval time Electronic thermal O/L relay 15.1 21.0 Base frequency voltage Stall prevention operation level 70.0 83.0 85.0 75.0 Enhanced function display selection...
  • Page 52 YO99-0874-DI-002-18 Table. 9 Parameter setting: Mitsubishi FR-D720 series Parameter No. Parameter PRC-003A PRC-006A PRC-012A PRC-018A Maximum frequency Electronic thermal O/L relay 15.1 21.0 Base frequency voltage 58.5 75.5 80.1 72.3 Stall prevention operation level Restart casting time Number retries alarm...

  • Page 53: Separate Evacuation Of Lubricating Chamber

    YO99-0874-DI-002-18 5.5 Separate Evacuation of Lubricating Chamber The oil flow from the lubricating chamber into the rotor chamber is reduced by the employment of a special shaft seal in the PRC-A series mechanical booster pumps. The oil flow can be minimized by evacuating the lubricating chamber by another vacuum pump.

  • Page 54: Preparation

    YO99-0874-DI-002-18 5.5.1 Preparation The separate exhaust port of the lubricating chamber is at the center of the oil trap flange (B) on the top on the motor-side cover. It is covered with a plug to keep off foreign matter on delivery. (1) Remove the plug from the separate exhaust port of the lubricating chamber.

  • Page 55: Operation

    YO99-0874-DI-002-18 5.5.6 Operation When the preparations for operation are completed, make a test run. Supply cooling water and put the pump into operation. The oil in the viewing window will bubble immediately after the start of pump operation, but the bubbles will soon disappear. During operation, check the following.

  • Page 56: Optional Attachment Figure

    YO99-0874-DI-002-18 5.6 Optional attachment figure Fig. 14 PRC-003A Optional attachment figure...
  • Page 57 YO99-0874-DI-002-18 Fig. 15 PRC-006A Optional attachment figure...
  • Page 58 YO99-0874-DI-002-18 Fig. 16 PRC-012A Optional attachment figure...
  • Page 59 YO99-0874-DI-002-18 Fig. 17 PRC-018A Optional attachment figure...

  • Page 60: Maintenance And Check

    YO99-0874-DI-002-18 6. Maintenance and Check 6.1 Maintenance Conduct the maintenance regularly in appropriate check interval. Maintenance period shall differ depending on the operation purpose. Set the interval once a day at first. Once a week from next week if you had no problem, then conduct once a month for example. We recommend you, however, to conduct visual checks and check on the utility every day to see the system condition.

  • Page 61: Inspection Items

    YO99-0874-DI-002-18 6.2 Inspection Items Refer to the “Table. 11 Maintenance list” below. Table. 11 Maintenance list Inspection item Check Possible cause Corrective action To be within the leve Oil flowed into pump Visual check of Oil level lines. casing. casing interior. Clogged cooling Is the flow rate more Cooling water...
  • Page 62 Should the Vacuum pump oil touched to your hand or entered in your eye, immediately follow the emergency treatment described on the SDS. Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our guarantee as it might impair the pump performance and shorten the life cycle.

  • Page 63: Checkup After Storage For A Long Period

    YO99-0874-DI-002-18 6.3 Checkup after storage for a long period Long term storage of the Vacuum pump without operation might possibly cause trouble in operation caused by rust. If you kept the Pump long time without operating it, ask a closest Service Center for the check. 6.4 Overhaul If there found remarkable Pump contamination or performance deterioration due to the operation condition, you are recommended to conduct regular overhaul regardless of the check items described...

  • Page 64: Troubleshooting

    YO99-0874-DI-002-18 6.5Troubleshooting Table. 12 Troubleshooting Trouble Check item Criteria Corrective action symptom Check the no-fuse Are the no-fuse breaker Failure of breaker and and electromagnetic components. electromagnetic switch. switch normal? Trip. Reset the thermal relay. Are all three phases of Abnormal phase Check the power supply.
  • Page 65 YO99-0874-DI-002-18 Trouble Check item Criteria Corrective action symptom motor rotating Check power cable and Reverse rotation. direction normal? connecting terminals. Pressure is above Is the ultimate pressure prescribed Change the fore pump oil. of fore pump normal? value. Pressure Is there any leak in does In normal operation.

  • Page 66: Removal / Transport

    YO99-0874-DI-002-18 7. Removal / transport 7.1 Operation procedure Stop the Pump operation and replace the gas completely with the nitrogen gas (to be required only in the case used any special gas). Shut the electricity supply and remove the cable connection. Remove the Cooling water piping.

  • Page 67: Disposal

    YO99-0874-DI-002-18 8. Disposal Make sure to keep in compliance with the laws and regulations established by the local governments to dispose the Vacuum pump. You should ask the dedicated disposal agency for the disposal particularly if the Pump has exhausted any toxic gas. Note that you are requested to bear the cost and charges relating to the disposal.

  • Page 68: Warranty Clauses

    9.4 Response procedure Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. or the local ULVAC representatives.

  • Page 69: Disclaimer

    Product deficiency or secondary damnification occurred to Buyer. Product deficiency or secondary damnification occurred to Buyer, from law suit to ULVAC by third party for patent infringement. The reason of the failure deemed below the specified usage condition by ULVAC technical staff. (10) Consumable parts （refer to “10.

  • Page 70: Main Displacement Parts

    YO99-0874-DI-002-18 10. Main Displacement Parts Table. 13 PRC-003A Main displacement parts list Description Specification Material Q'ty Location Teflon seal VCF30405 Special rubber Side cover Ball bearing 6205-P5 Bearing case Coupling spider Hs76 for M-74 Motor coupling section O-ring AS568-268 Casing, side cover...
  • Page 71 YO99-0874-DI-002-18 Table. 14 PRC-006A Main displacement parts list Description Specification Material Q'ty Location Special Teflon seal VCF36506 Side cover rubber Ball bearing 6206-P5 Bearing case Coupling spider Hs76 for M-74 Motor coupling section O-ring AS568-276 Casing, side cover O-ring V100 Intake port O-ring Communicating port...
  • Page 72 YO99-0874-DI-002-18 Table. 15 PRC-012A Main displacement parts list Description Specification Material Q'ty Location Special Teflon seal VCF44607 Side cover rubber Ball bearing 6207-P5 Bearing case Coupling spider Hs76 for M-84 Motor coupling section O-ring AS568-278 Casing, side cover O-ring V120 Intake port O-ring Communicating port...
  • Page 73 YO99-0874-DI-002-18 Table. 16 PRC-018A Main displacement parts list Description Specification Material Q'ty Location Special Teflon seal VCF44607 Side cover rubber Ball bearing 6207-P5 Bearing case Coupling spider Hs76 for M-90 Motor coupling section O-ring AS568-278 Casing, side cover O-ring V175 Intake port O-ring Communicating port...
  • Page 74 YO99-0874-DI-002-18 This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
  • Page 75 ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.

This manual is also suitable for:

Prc-006aPrc-012aPrc-018a

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