Ulvac PMB100D Instruction Manual page 107

Mechanical booster pump
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Trouble
Water leak
Coolant joints and so on
outside
1
got loose, or not tighten.
the Pump.
Are all three phases of
1
power supply normal?
Abnormal phase voltage.
Rotation is
uneven, and
so it was
2
Oil is dirty.
going not to
rotate
gradually.
Foreign substance entered
3
inside the Pump impaired
the Motor rotation.
Initially,
performanc
e was being
satisfied,
Foreign substance entered
but the
1
in the Pump.
vacuum
Scar on the rotor surface.
degree
became
decreased.
Causes
80
Processing Method
Check and repair Joints and
so on.
Check the power supply.
Replace with new oil.
Conduct the overhaul.
(Inside cleaning)
Conduct the overhaul.
Removal of foreign substance
inside the Pump.
Conduct the overhaul
(replacement of the Casing,
Rotor, Cover and so on.)
YK11-0016-DI-002-08
Reference
3.6
6.2.5
3.5
3.2
6.2.1
6.2.2
6.2.3
6.2.8
6.4
2.2
6.2.8
6.4

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