Ulvac PMB100D Instruction Manual page 106

Mechanical booster pump
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Trouble
Oil leaks to
Deterioration of the O-ring
1
the outside
of the Case and Cover.
of the
2
Oil inlet is loose.
pump.
Foreign substance entered
1
inside the Pump impaired
the Motor rotation.
There is a leak in the pipe
The motor
3
connecting with the Pump.
current
value is
The rotor is in contact with
abnormal.
4
each other
Pressure is over the
2
maximum pumping
pressure.
Oil of the
reservoir
through an
oil level
Oil leak from the
1
gauge of
Mechanical seal
the cover on
the motor
side.
Air leak
from the
Mechanical
Is it after long time stop?
seal during
1
Did it stop long time?
Pump
operation
stop
Causes
79
Processing Method
Conduct the overhaul.
Tighten again the Oil inlet.
Conduct the overhaul.
Removal of foreign substance
inside the Pump.
Use a Leak detector or the like
to find out the leak position and
stop it.
Conduct the overhaul.
Check pressure on intake and
exhaust sides.
Check the backing pump.
Drain out oil of the reservoir, and
it relubricates the cover on the
motor side.
or
If the oil pooled 0.15mL/Hour or
more, You need Replace the
Mechanical seal.
Lubricate the Mechanical seal
and run the unit a while, or
rotate it by the hand.
Check again the leak after that.
YK11-0016-DI-002-08
Reference
6.2.3
6.4
-
6.2.8
6.4
2.6
6.4
2.2
2.6
3.2.2
6.2.4
3.2.2

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